Mr. Hyun-Jong Lee Profile

Hyun-Jong Lee

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 8 November 2012 Paper

Novel DPT methodology co-optimized with design rules for sub-20nm device

Hyun-Jong Lee, Soo-Han Choi, Jae-Seok Yang, Kwan-Young Chun, Jeong-ho Do, Chul-Hong Park

Proceedings Volume 8522, 85220T (2012) https://doi.org/10.1117/12.964976

KEYWORDS: Optical lithography, Critical dimension metrology, Source mask optimization, Photomasks, Double patterning technology, Resolution enhancement technologies, Lithography, Lithographic illumination, Extreme ultraviolet

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Proceedings Article | 23 March 2011 Paper

Hotspot fixing using ILT

Woojoo Sim, Sunggon Jung, Hyun-Jong Lee, Sungsoo Suh, Jung-Hoon Ser, Seong-Woon Choi, Chang-Jin Kang, Thomas Cecil, Christopher Ashton, David Irby, Xin Zhou, D.H. Son, Guangming Xiao, David Kim

Proceedings Volume 7973, 79731L (2011) https://doi.org/10.1117/12.879781

KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Photovoltaics, Data modeling, Lithography, SRAF, Calibration, Nanoimprint lithography, Resolution enhancement technologies

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Proceedings Article | 23 March 2011 Paper

Enhancing fullchip ILT mask synthesis capability for IC manufacturability

Thomas Cecil, Chris Ashton, David Irby, Lan Luan, D. H. Son, Guangming Xiao, Xin Zhou, David Kim, Bob Gleason, H. J. Lee, W. J. Sim, M. J. Hong, S. G. Jung, S. S. Suh, S. W. Lee

Proceedings Volume 7973, 79731C (2011) https://doi.org/10.1117/12.882814

KEYWORDS: Photomasks, Lithography, Optical proximity correction, Manufacturing, SRAF, Image segmentation, Inverse problems, Optimization (mathematics), Electronics, Electroluminescence

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