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Ines Kluge
at RWTH Aachen Univ
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Publications (1)
Proceedings Article | 5 March 2022 Open Access Presentation + Paper
Flip-chip-integrated silicon nitride ECL at 640nm with relaxed alignment tolerances
Proceedings Volume 12006, 120060E (2022) https://doi.org/10.1117/12.2607615
KEYWORDS: Photonic integrated circuits, Waveguides, Tolerancing, Silicon, Semiconductor lasers, Assembly tolerances, Optical alignment, Visible radiation
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