Mr. Junsu Jeon Profile

Junsu Jeon

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 4 April 2019 Presentation + Paper

A novel design-for-yield solution based on interconnect level layout improvements at 7nm technology node

Jaehwan Kim, Sangah Lee, Byungchul Shin, J. Jeon, Jin Kim, B. M. Kim, Jae-Hyun Kang, Seungweon Paek, Piyush Pathak, Frank Gennari, Philippe Hurat, Ya-Chieh Lai

Proceedings Volume 10962, 1096204 (2019) https://doi.org/10.1117/12.2514896

KEYWORDS: Computer aided design, Metals, Resolution enhancement technologies, Optical lithography, CMOS technology, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Double patterning technology, Manufacturing

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Proceedings Article | 15 March 2012 Paper

In-design process hotspot repair using pattern matching

Daehyun Jang, Naya Ha, Junsu Jeon, Jae-Hyun Kang, Seung Weon Paek, Hungbok Choi, Kee Sup Kim, Ya-Chieh Lai, Philippe Hurat, Wilbur Luo

Proceedings Volume 8327, 83270S (2012) https://doi.org/10.1117/12.916199

KEYWORDS: Silicon, Manufacturing, Lithography, Failure analysis, Data processing, Chemical mechanical planarization, Semiconducting wafers, Design for manufacturability, Tolerancing, Optical lithography

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