Mr. Jako Greuters Profile

Jako Greuters

at Exitech Ltd

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 22 March 2006 Paper

RIM-13: A high-resolution imaging tool for aerial image monitoring of patterned and blank EUV reticles

M. Booth, A. Brunton, J. Cashmore, P. Elbourn, G. Elliner, M. Gower, J. Greuters, J. Hirsch, L. Kling, N. McEntee, P. Richards, V. Truffert, I. Wallhead, M. Whitfield

Proceedings Volume 6151, 61510B (2006) https://doi.org/10.1117/12.657556

KEYWORDS: Reticles, Extreme ultraviolet, Microscopes, Photomasks, Extreme ultraviolet lithography, Vibration isolation, Imaging systems, Particles, Inspection, Image analysis

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Proceedings Article | 8 November 2005 Paper

RIM-13: a high-resolution imaging tool for aerial image monitoring of EUV reticles

M. Booth, A. Brunton, J. Cashmore, P. Elbourn, G. Elliner, M. Gower, J. Greuters, J. Hirsch, L. Kling, N. McEntee, P. Richards, V. Truffert, I. Wallhead, M. Whitfield, R. Hudyma

Proceedings Volume 5992, 59922C (2005) https://doi.org/10.1117/12.629562

KEYWORDS: Reticles, Extreme ultraviolet, Objectives, Microscopes, Mirrors, Extreme ultraviolet lithography, EUV optics, Scintillators, Inspection, Imaging systems

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Proceedings Article | 6 May 2005 Paper

High-resolution EUV imaging tools for resist exposure and aerial image monitoring

M. Booth, O. Brisco, A. Brunton, J. Cashmore, P Elbourn, G. Elliner, M. Gower, J. Greuters, P. Grunewald, R. Gutierrez, T. Hill, J. Hirsch, L. Kling, N. McEntee, S. Mundair, P. Richards, V. Truffert, I. Wallhead, M. Whitfield, R. Hudyma

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.606715

KEYWORDS: Reticles, Extreme ultraviolet, Objectives, Extreme ultraviolet lithography, Mirrors, Microscopes, Semiconducting wafers, EUV optics, Scintillators, Inspection

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Proceedings Article | 12 April 2005 Paper

Laser micromachining techniques for industrial MEMS applications

Heather Booth, Charles Abbott, Ric Allott, Karl Boehlen, Jim Fieret, Jako Greuters, Paul Trimble, James Pedder

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.599414

KEYWORDS: Photomasks, Nd:YAG lasers, Microelectromechanical systems, Excimer lasers, Computer aided design, Micromachining, Semiconductor lasers, Laser processing, Laser applications, Silicon

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Proceedings Article | 27 August 2003 Paper

UV laser micromachining of silicon, indium phosphide, and lithium niobate for telecommunications applications

Jako Greuters, Nadeem Rizvi

Proceedings Volume 4876, (2003) https://doi.org/10.1117/12.463653

KEYWORDS: Silicon, Etching, Micromachining, Semiconductor lasers, Excimer lasers, Lithium niobate, Laser cutting, Semiconducting wafers, Hybrid silicon lasers, Telecommunications

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Proceedings Article | 15 April 2003 Paper

Laser micromachining of optical materials with a 157-nm fluorine laser

Jako Greuters, Nadeem Rizvi

Proceedings Volume 4941, (2003) https://doi.org/10.1117/12.468234

KEYWORDS: Micromachining, Etching, Silica, Fluorine, Waveguides, Laser applications, Photonics, Lithium niobate, Indium, Photonic devices

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Proceedings Article | 29 June 2001 Paper

Laser micromachining: new techniques and developments for display applications

Nadeem Rizvi, Jako Greuters, Jason Dallimore, Keren Hamilton, Robin Clabburn, Bran Ebsworth

Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432519

KEYWORDS: Micromachining, LCDs, Reflectivity, Laser applications, Excimer lasers, Polymers, Diffusers, Prisms, Scanning electron microscopy, Laser development

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Proceedings Article | 30 April 2001 Paper

Development of a laser micromachining toolbox and its application to the production of 3D microstructures

Jako Greuters, Nadeem Rizvi

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425325

KEYWORDS: Micromachining, Microelectromechanical systems, Laser development, Excimer lasers, Manufacturing, 3D microstructuring, Etching, Optical design, Laser ablation, Pulsed laser operation

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Showing 5 of 8 publications

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