Dr. Jan-Uwe Schmidt Profile

Dr. Jan-Uwe Schmidt

at Fraunhofer-Institut für Photonische Mikrosysteme

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Author

Publications (17)

Proceedings Article | 28 February 2020 Paper

Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform

A. Gehner, S. Döring, D. Rudloff, D. Kunze, P. Dürr, S. Francés, L. Hänsel, H. Torlee, A. Elgner, M. Eckert, M. Friedrichs, J. Heber, J. Schmidt, W. Pufe, C. Hohle, M. Schulze, M. Wagner

Proceedings Volume 11293, 1129302 (2020) https://doi.org/10.1117/12.2543052

KEYWORDS: Mirrors, Actuators, Micromirrors, Optical lithography, Calibration, Analog electronics, CMOS technology

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Proceedings Article | 7 March 2014 Paper

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt, Ulrike Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, Torbjorn Sandstrom

Proceedings Volume 8977, 89770O (2014) https://doi.org/10.1117/12.2036533

KEYWORDS: Spatial light modulators, Mirrors, Modulation, Imaging systems, Copper, Electrodes, Silica, Laser applications, Semiconductor lasers, Laser processing

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Proceedings Article | 16 February 2012 Paper

One-dimensional light modulator

S. Sinning, I. Wullinger, J.-U. Schmidt, M. Friedrichs, U. Dauderstädt, S. Wolschke, T. Hughes, D. Pahner, M. Wagner

Proceedings Volume 8252, 82520H (2012) https://doi.org/10.1117/12.906651

KEYWORDS: Mirrors, Modulators, Micromirrors, Electrodes, Laser applications, Continuous wave operation, Surface properties, Reflectivity, Microopto electromechanical systems, Printed circuit board testing

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Proceedings Article | 14 May 2010 Paper

Multispectral characterization of diffractive micromirror arrays

Dirk Berndt, Jörg Heber, Steffen Sinning, Detlef Kunze, Jens Knobbe, Jan-Uwe Schmidt, Martin Bring, Dirk Rudloff, Martin Friedrichs, Jana Rössler, Mark Eckert, Wolfram Kluge, Hannes Neumann, Michael Wagner, Hubert Lakner

Proceedings Volume 7718, 77180Q (2010) https://doi.org/10.1117/12.854382

KEYWORDS: Mirrors, Micromirrors, Reflectivity, Diffraction, Imaging systems, Cameras, Homogenization, Deep ultraviolet, Laser sources, Spherical lenses

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Proceedings Article | 14 May 2010 Paper

Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range

J.-U. Schmidt, M. Bring, J. Heber, M. Friedrichs, D. Rudloff, J. Rößler, D. Berndt, H. Neumann, W. Kluge, M. Eckert, M. List, M. Müller, M. Wagner

Proceedings Volume 7716, 77162L (2010) https://doi.org/10.1117/12.855750

KEYWORDS: Mirrors, Actuators, Electronics, Metals, Micromirrors, Deep ultraviolet, Control systems, Near infrared, Reflectivity, Electron beam lithography

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Proceedings Article | 19 May 2009 Paper

Aluminium nitride: a promising and full CMOS compatible piezoelectric material for MOEMS applications

Holger Conrad, Jan Uwe Schmidt, Wolfram Pufe, Fabian Zimmer, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 7362, 73620J (2009) https://doi.org/10.1117/12.821715

KEYWORDS: Aluminum nitride, Silicon, Semiconducting wafers, Thin films, Sputter deposition, Finite element methods, X-ray diffraction, Microopto electromechanical systems, Crystals, Diffraction

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Proceedings Article | 19 February 2009 Paper

Advances in SLM development for microlithography

Ulrike Dauderstädt, Per Askebjer, Peter Björnängen, Peter Dürr, Martin Friedrichs, Matthias List, Dirk Rudloff, Jan-Uwe Schmidt, Michael Müller, Michael Wagner

Proceedings Volume 7208, 720804 (2009) https://doi.org/10.1117/12.810787

KEYWORDS: Mirrors, Spatial light modulators, Electrodes, Optical lithography, Micromirrors, Laser systems engineering, Actuators, Aluminum, Deep ultraviolet, Dielectrics

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Proceedings Article | 25 April 2008 Paper

Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates

Jan-Uwe Schmidt, Martin Friedrichs, Thor Bakke, Benjamin Voelker, Dirk Rudloff, Hubert Lakner

Proceedings Volume 6993, 69930D (2008) https://doi.org/10.1117/12.787015

KEYWORDS: Mirrors, Actuators, Silicon, Electrodes, Micromirrors, Adhesives, Spatial light modulators, Wafer bonding, Semiconducting wafers, Multilayers

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SPIE Journal Paper | 1 April 2008

Amorphous TiAl films for micromirror arrays with stable analog deflection integrated on complementary metal oxide semiconductors

Jan-Uwe Schmidt, Martin Friedrichs, Andreas Gehner

JM3, Vol. 7, Issue 02, 021012, (April 2008) https://doi.org/10.1117/12.10.1117/1.2945230

KEYWORDS: Actuators, Mirrors, Aluminum, Reflectivity, Micromirrors, CMOS technology, Analog electronics, Deep ultraviolet, Multilayers, Etching

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Proceedings Article | 9 February 2007 Paper

CMOS integrable micromirrors with highly improved drift-stability

Jan Schmidt, Jens Knobbe, Andreas Gehner, Hubert Lakner

Proceedings Volume 6467, 64670R (2007) https://doi.org/10.1117/12.707630

KEYWORDS: Mirrors, Actuators, Reflectivity, Aluminum, Silicon, Micromirrors, Electrodes, Analog electronics, Microelectromechanical systems, X-rays

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Proceedings Article | 23 January 2006 Paper

Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Minghong Yang, Alexandre Gatto, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 6114, 61140H (2006) https://doi.org/10.1117/12.644626

KEYWORDS: Aluminum, Reflectivity, Silver, Mirrors, Optical coatings, Micromirrors, Gold, Laser damage threshold, Dielectrics, Microopto electromechanical systems

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Proceedings Article | 23 January 2006 Paper

Micro-actuator with extended analog deflection at low drive voltage

Peter Dürr, Andreas Gehner, Jan Schmidt, Detlef Kunze, Michael Wagner, Hubert Lakner

Proceedings Volume 6114, 61140I (2006) https://doi.org/10.1117/12.645826

KEYWORDS: Actuators, Electrodes, Mirrors, Capacitors, Analog electronics, Electronics, Finite element methods, Chemical elements, Safety, Electromagnetism

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Proceedings Article | 5 October 2005 Paper

Laser ablation of SiOx thin films for direct mask writing

J. Heber, J. Ihlemann, M. Schulz-Ruhtenberg, J. Schmidt

Proceedings Volume 5963, 596326 (2005) https://doi.org/10.1117/12.625359

KEYWORDS: Laser ablation, Thin films, Silica, Annealing, Photomasks, Optical lithography, Excimer lasers, Coating, Ultraviolet radiation, Optical design

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Proceedings Article | 5 October 2005 Paper

VUV optical coatings for the next-generation micro-mechanical mirrors

Minghong Yang, Alexandre Gatto, Norbert Kaiser, Jan Uwe Schmidt, Thilo Sandner, Jörg Heber, Harald Schenk, Hubert Lakner

Proceedings Volume 5963, 596322 (2005) https://doi.org/10.1117/12.625138

KEYWORDS: Aluminum, Mirrors, Vacuum ultraviolet, Coating, Reflectivity, Micromirrors, Optical coatings, Spatial light modulators, Oxides, Dielectrics

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Proceedings Article | 5 October 2005 Paper

Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region

Thilo Sandner, Jan Uwe Schmidt, Harald Schenk, Hubert Lakner, Minghong Yang, Alexandre Gatto, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 5963, 596314 (2005) https://doi.org/10.1117/12.625246

KEYWORDS: Reflectivity, Aluminum, Mirrors, Silver, Micromirrors, Thin film coatings, Optical coatings, Laser damage threshold, Radium, Dielectrics

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Proceedings Article | 22 January 2005 Paper

Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Alexandre Gatto, Minghong Yang, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590522

KEYWORDS: Mirrors, Aluminum, Micromirrors, Deep ultraviolet, Reflectivity, Coating, Spatial light modulators, Vacuum ultraviolet, Multilayers, Silicon

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Proceedings Article | 22 January 2005 Paper

Micromechanical scanning mirrors with highly reflective NIR coatings for high-power applications

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Stefan Braun, Thomas Foltyn, Andreas Leson, Alexandre Gatto, Minghong Yang, Norbert Kaiser

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590448

KEYWORDS: Reflectivity, Aluminum, Near infrared, Mirrors, Optical coatings, Silver, Absorption, Dielectrics, Multilayers, Microopto electromechanical systems

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Showing 5 of 17 publications

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