Mr. Jan Krüger Profile

Jan Krüger

at Physikalisch-Technische Bundesanstalt

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Publications (7)

Proceedings Article | 23 August 2023 Presentation

Efficient simulation of microscopic imaging for reconstruction of nanostructures

Phillip Manley, Jan Krüger, Bernd Bodermann, Rainer Köning, Andreas Heinrich, Christian Eder, Aksel Goehnermeier, Ulrike Zeiser, Martin Hammerschmidt, Lin Zschiedrich, Philipp-Immanuel Schneider

Proceedings Volume PC12619, PC126190B (2023) https://doi.org/10.1117/12.2673077

KEYWORDS: Nanostructures, Electron microscopy, Scattering, Diffraction limit, Diffraction, Optical microscopy, Near field optics, Near field, Multilayers, Modeling

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Proceedings Article | 23 August 2023 Presentation

On aberration retrieval for optical microscopes in length metrology

Jan Krüger, Bernd Bodermann, Rainer Köning, Phillip Manley, Lin Zschiedrich, Philipp-Immanuel Schneider, Andreas Heinrich, Christian Eder, Ulrike Zeiser, Aksel Goehnermeier

Proceedings Volume PC12619, PC126190A (2023) https://doi.org/10.1117/12.2672294

KEYWORDS: Optical aberrations, Imaging systems, Optical microscopes, Metrology, Point spread functions, Simulations, Reflection, Quality systems, Polarization, Objectives

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Proceedings Article | 10 August 2023 Presentation + Paper

Rigorous modeling of a confocal microscope

Silvana Wyss, Jan Krüger, Jana Grundmann, Bernd Bodermann, Sai Gao, Liwei Fu, Alexander Birk, Karsten Frenner, Stephan Reichelt

Proceedings Volume 12619, 126190Q (2023) https://doi.org/10.1117/12.2673784

KEYWORDS: Simulations, Finite-difference time-domain method, Microscopes, Light sources and illumination, Finite element methods, Confocal microscopy, Reflection, Diffraction, Plane waves

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Proceedings Article | 20 May 2022 Paper

Reconstructing phase aberrations for high-precision dimensional microscopy

Philipp-Immanuel Schneider, Phillip Manley, Jan Krüger, Lin Zschiedrich, Rainer Köning, Bernd Bodermann, Sven Burger

Proceedings Volume 12137, 121370I (2022) https://doi.org/10.1117/12.2620762

KEYWORDS: Microscopes, Finite element methods, Microscopy, Data modeling, Image processing, Dimension reduction, Process modeling, Model-based design

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Proceedings Article | 12 September 2021 Presentation

Demonstrating a model-based edge detection and the impact of the illumination pupil’s discretization in optical microscopy

Jan Krüger, Rainer Köning, Bernd Bodermann

Proceedings Volume 11875, 118750D (2021) https://doi.org/10.1117/12.2600086

KEYWORDS: Model-based design, Edge detection, Optical microscopy, Optical simulations, Nanostructures, Finite element methods, Standards development, Refraction, Optical design, Numerical simulations

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A model-based edge detection is always required when quantitatively evaluating the bidirectional measurements of micro- and nanostructures in optical microscopy. For example, the accurate determination of the width of a structure requires the knowledge of the location of the real physical edges in the measured profile. The interpretation of the measured edge profile cannot be performed intuitively due to distortion which is caused by diffraction and refraction. We advise a model-based edge detection algorithm which is based on rigorous simulations of the microscope’s imaging. The intensity level which corresponds to the position of the real physical edge is called the threshold and it is determined in the simulations. For these optical simulations we employ the JCMsuite, which is a software application of the finite-element-method (FEM). Since numerical and semi-analytical methods for the calculation of electromagnetics in optical systems rely to some degree on approximations, their results may vary even when the input parameters are identical. We apply a test suite of input parameters for the purpose of comparing numerical simulation tools regarding the resulting thresholds for measurements on line-shaped nanostructures in a periodic grating. The test suite maintains the illumination and imaging parameters of a transmitted light UV-microscope while the object parameters of a binary line grating are varied. There are 25 grating configurations with different line-to-space ratios, where the line width ranges from the resolution limit up to almost 10 µm. The illumination pupil is discretized in a cartesian grid with 113 grid points in total. We introduce different pupil samplings, after calculating the threshold values of the original test suite. We obtain a high agreement of the thresholds results and the related linewidth values when comparing with already performed results of two additional rigorous applications. Furthermore, we showcase the threshold variation for different samplings of the illumination pupil.

Proceedings Article | 20 June 2021 Presentation

Characterization of the optical aberrations of a metrological UV microscope

Jan Krüger, Bernd Bodermann, Rainer Köning, Wolfgang Haessler-Grohne, Han Xu

Proceedings Volume 11783, 117830F (2021) https://doi.org/10.1117/12.2592566

KEYWORDS: Optical aberrations, Microscopes, Metrology, Ultraviolet radiation, Optical components, Imaging systems, Image processing, Zernike polynomials, Visibility, Quantitative analysis

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Proceedings Article | 21 June 2019 Presentation + Paper

Systematic approach on illustrating the challenges represented by optical bidirectional measurements using rigorous simulations

Jan Krüger, Rainer Köning, Bernd Bodermann

Proceedings Volume 11057, 110570D (2019) https://doi.org/10.1117/12.2527973

KEYWORDS: Finite element methods, Diffraction, Microscopes, Imaging systems, Optical testing, Diffraction gratings, Quartz, Computer simulations

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Showing 5 of 7 publications

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