Dr. Jangryul Park Profile

Dr. Jangryul Park

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 2 October 2024 Presentation

A novel integrated microsphere-assisted hyperspectral metrology and autofocus method for semiconductor devices

Soonyang Kwon, Jangryul Park, Young-sun Choi, Kwangrak Kim, Youngjun Lee, Jiwoong Kim, Taeyong Jo, Myungjun Lee

Proceedings Volume PC13130, PC1313008 (2024) https://doi.org/10.1117/12.3025804

KEYWORDS: Time metrology, Semiconductors, Metrology, Microspheres, Imaging systems, Hyperspectral imaging, Super resolution, Reflection, Distance measurement, 3D metrology

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Proceedings Article | 8 March 2021 Presentation + Paper

Microsphere-assisted ultra-small spot spectral reflectometry technique for semiconductor device metrology

Soonyang Kwon, Kwangrak Kim, Jangryul Park, Yunje Cho, Myungjun Lee

Proceedings Volume 11611, 116110G (2021) https://doi.org/10.1117/12.2582269

KEYWORDS: Reflectometry, Super resolution, Reflectance spectroscopy, Semiconductors, Metrology, Photonic nanostructures, Spectroscopes, Signal to noise ratio, Semiconducting wafers, Image resolution

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