Heterogeneous integrated waveguide-grating-coupled VCSEL and REPD arrays have been demonstrated,
achieving an output power of >1.4 mW per facet, and VCSEL-to-photodetector data communication at 2.5
Gb/s through an integrated waveguide. Integrated WDM arrays have also been achieved. This technology
enables the realization of VCSEL-based planar photonic integrated circuits.
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