Dr. Jimmy Price Profile

Dr. Jimmy Price

at SEMATECH Inc

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Author

Publications (3)

Proceedings Article | 24 March 2009 Paper

Nonplanar high-k dielectric thickness measurements using CD-SAXS

Chengqing Wang, Kwang-Woo Choi, Yi-Ching Chen, Jimmy Price, Derek Ho, Ronald Jones, Christopher Soles, Erik Lin, Wen-Li Wu, Benjamin Bunday

Proceedings Volume 7272, 72722M (2009) https://doi.org/10.1117/12.813757

KEYWORDS: Dielectrics, Scanning electron microscopy, Scattering, X-rays, Data modeling, Sensors, Transistors, Critical dimension metrology, Laser scattering, Silicon

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Proceedings Article | 24 March 2008 Paper

Measurement of high-k and metal film thickness on FinFET sidewalls using scatterometry

Thaddeus Dziura, Benjamin Bunday, Casey Smith, Muhammad Hussain, Rusty Harris, Xiafang Zhang, Jimmy Price

Proceedings Volume 6922, 69220V (2008) https://doi.org/10.1117/12.773593

KEYWORDS: Semiconducting wafers, Metals, Scatterometry, Dielectrics, Tin, Metrology, Data modeling, Silicon, Oxides

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Proceedings Article | 4 April 2006 Open Access

Metrology (including materials characterization) for nanoelectronics

A. Diebold, J. Price, P. Hung

Proceedings Volume 6175, 617501 (2006) https://doi.org/10.1117/12.661119

KEYWORDS: Transistors, Silicon, Metrology, Dielectrics, Transmission electron microscopy, Nanoelectronics, CMOS technology, Diffraction, Semiconductors, Nanowires

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