Mr. John C. Moore Profile

John C. Moore

Director of Product Development at General Chemical Corp

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Publications (3)

Proceedings Article | 14 May 2004 Paper

Rapid stripping of thick negative-tone acrylic photoresists for semiconductor BEOL applications

John Moore, Bruce Fender, Eric Huenger

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.541543

KEYWORDS: Semiconducting wafers, Copper, Metals, Photoresist materials, Polymers, Chemistry, Photoresist processing, Back end of line, Aluminum, Safety

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Proceedings Article | 2 June 2003 Paper

Method for rapid screening of photoresist strippers for acceptance in DUV lithographic areas

John Moore, Shankar Acharya

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.488118

KEYWORDS: Deep ultraviolet, Photoresist materials, FT-IR spectroscopy, Chemistry, Photoresist processing, Lithography, Catalysis, Semiconducting wafers, Photoresist developing, Statistical analysis

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Proceedings Article | 24 July 2002 Paper

Successful photoresist removal: incorporating chemistry, conditions, and equipment

John Moore

Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474207

KEYWORDS: Chemistry, Polymers, Photoresist processing, Polymerization, Etching, Semiconducting wafers, Ultrasonics, Photoresist materials, Liquids, Molecules

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