Mr. John Nelson Profile

John Nelson

at DuPont Electronics & Industrial

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Publications (3)

Proceedings Article | 24 March 2020 Presentation

Line width roughness reduction strategies utilizing power spectral density analysis (Conference Presentation)

Charlotte Cutler, Dan Millward, Choong-Bong Lee, James Thackeray, John Nelson, Jason DeSisto, Rochelle Rena, Chris Mack

Proceedings Volume 11326, 113260H (2020) https://doi.org/10.1117/12.2551694

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Proceedings Article | 25 March 2019 Presentation + Paper

Roughness power spectral density as a function of aerial image and basic process/resist parameter

Charlotte Cutler, Choong Bong Lee, James Thackeray, John Nelson, Jason DeSisto, Rochelle Rena, Peter Trefonas, Chris Mack

Proceedings Volume 10960, 109600I (2019) https://doi.org/10.1117/12.2515073

KEYWORDS: Line width roughness, Nanoimprint lithography, Diffusion, Diffractive optical elements, Image processing, Photoresist processing, Temperature metrology, Image analysis, Image resolution, Lithography

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Proceedings Article | 23 March 2018 Presentation + Paper

Roughness power spectral density as a function of resist parameters and its impact through process

Charlotte Cutler, James Thackeray, Jason DeSisto, John Nelson, Choong-Bong Lee, Mingqi Li, Emad Aqad, Xisen Hou, Tomas Marangoni, Joshua Kaitz, Rochelle Rena, Chris Mack

Proceedings Volume 10587, 1058707 (2018) https://doi.org/10.1117/12.2297690

KEYWORDS: Line width roughness, Scanning electron microscopy

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