Mr. Jonghyuk Yoon Profile

Jonghyuk Yoon

at Korea Electronics Technology Institute

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Molybdenum carbide pellicle for high-power EUV lithography

Yongkyung Kim, Kihun Seong, Jonghyuk Yoon, Donggi Lee, Seungchan Moon, Sung Kyu Jang, Hyun-Mi Kim, Seul-Gi Kim, Jinho Ahn, Hyeongkeun Kim

Proceedings Volume 12750, 127500L (2023) https://doi.org/10.1117/12.2686314

KEYWORDS: Extreme ultraviolet lithography, Pellicles, Extreme ultraviolet, Plasma, Molybdenum, Transmittance, Hydrogen, High volume manufacturing, Semiconducting wafers, Scattering

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