Mr. Kangjin Kim Profile

Kangjin Kim

at SK Hynix Inc

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Publications (1)

Proceedings Article | 30 April 2023 Presentation

Machine learning based inverse lithography technology for an advanced DRAM contact layer

Moongyu Jeong, Hyunchul Kim, Kyle Braam, Munhoe Do, Kangjin Kim, Jongcheon Park, Chunsoo Kang, Chanha Park, Thomas Cecil

Proceedings Volume 12495, 124951E (2023) https://doi.org/10.1117/12.2657808

KEYWORDS: Machine learning, Lithography, Photomasks, Source mask optimization, Numerical analysis, Convolutional neural networks, Computational lithography

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