Karthik Reddy
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 March 2013 Paper
Proceedings Volume 8615, 861517 (2013) https://doi.org/10.1117/12.2003100
KEYWORDS: Sensors, Polymers, Silicon, Coating, Chromatography, Semiconducting wafers, Nondestructive evaluation, Microfluidics, Sensing systems, Deep reactive ion etching

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