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An overview of the mirror design and manufacturing processes is presented. Predictions on the actuation performance have been made through finite element simulations demonstrating correctabilities on the order of 250-300× for astigmatic modes with only 41 independent actuators. A description of the custom metrology system used to characterize the active mirrors is also presented. The system is based on a Reverse Hartmann test and can accommodate extremely large deviations in mirror figure (> 100 μm PV) down to sub-micron precision. The system has been validated against several traditional techniques including photogrammetry and interferometry. The mirror performance has been characterized using this system, as well as closed-loop figure correction experiments on 150 mm dia. prototypes. The mirrors have demonstrated post-correction figure accuracies of 200 nm RMS (two dead actuators limiting performance).
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