Mr. Katsura Otaki Profile

Katsura Otaki

Researcher at Nikon Corp

SPIE Involvement:

Author

Publications (15)

Proceedings Article | 14 September 2023 Paper

Singlet metalenses with wide field-of-view of 170 deg. and the ghost noise

H. Toba, D. Mori, K. Otaki, H. Takagi, M. Ohashi, H. Konishi, S. Yoshikawa, Y. Takigawa

Proceedings Volume 12798, 1279804 (2023) https://doi.org/10.1117/12.2691602

KEYWORDS: Metalenses, Diffraction, Design and modelling, Optical filters, Diffractive optical elements, Transmittance, Fisheye lenses, Fabrication

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Proceedings Article | 27 September 2013 Paper

Wide field snapshot imaging polarimeter using modified Savart plates

Naooki Saito, Satoru Odate, Katsura Otaki, Masahiro Kubota, Rintaro Kitahara, Kazuhiko Oka

Proceedings Volume 8873, 88730M (2013) https://doi.org/10.1117/12.2022829

KEYWORDS: Polarimetry, Polarization, Surface plasmons, Calibration, Imaging systems, Distortion, Crystals, Prototyping, Optical design, Geometrical optics

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Proceedings Article | 21 March 2008 Paper

EUV wavefront measurement of six-mirror optics using EWMS

K. Sugisaki, M. Okada, K. Otaki, Y. Zhu, J. Kawakami, K. Murakami, C. Ouchi, M. Hasegawa, S. Kato, T. Hasegawa, H. Yokota, T. Honda, M. Niibe

Proceedings Volume 6921, 69212U (2008) https://doi.org/10.1117/12.772624

KEYWORDS: Wavefronts, Diffusion tensor imaging, Optical testing, Extreme ultraviolet, Projection systems, Mirrors, EUV optics, Wavefront metrology, Interferometers, Optics manufacturing

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Proceedings Article | 17 September 2005 Paper

Comparisons between EUV at-wavelength metrological methods

Katsumi Sugisaki, Masashi Okada, Yucong Zhu, Katsura Otaki, Zhiqiang Liu, Jun Kawakami, Mikihiko Ishii, Jun Saito, Katsuhiko Murakami, Masanobu Hasegawa, Chidane Ouchi, Seima Kato, Takayuki Hasegawa, Akiyoshi Suzuki, Hideo Yokota, Masahito Niibe, Mitsuo Takeda

Proceedings Volume 5921, 59210D (2005) https://doi.org/10.1117/12.616676

KEYWORDS: Wavefronts, Optical testing, Extreme ultraviolet, Metrology, Diffusion tensor imaging, Charge-coupled devices, EUV optics, Interferometers, Shearing interferometers, Diffraction

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Proceedings Article | 10 May 2005 Paper

Double-grating lateral shearing interferometer for EUV optics at-wavelength measurement

Zhiqiang Liu, Masashi Okada, Katsumi Sugisaki, Mikihiko Ishii, Yucong Zhu, Katsura Ohtaki, Jun Saito, Akiyoshi Suzuki, Masanobu Hasegawa, Chidane Ouchi, Seima Kato, Masahito Niibe, Katsuhiko Murakami

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599456

KEYWORDS: Diffraction, Diffraction gratings, Calibration, Shearing interferometers, Wavefronts, Light sources, Interferometers, Monochromatic aberrations, Extreme ultraviolet lithography, EUV optics

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Proceedings Article | 10 May 2005 Paper

Experimental comparison of absolute PDI and lateral shearing interferometer

Yucong Zhu, Katsumi Sugisaki, Masashi Okada, Katsura Otaki, Zhiqian Liu, Mikihiko Ishii, Jun Kawakami, Jun Saito, Katsuhiko Murakami, Chidane Ouchi, Masanobu Hasegawa, Seima Kato, Takayuki Hasegawa, Akiyoshi Suzuki, Masahito Niibe

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600274

KEYWORDS: Wavefronts, Shearing interferometers, Diffraction gratings, Extreme ultraviolet lithography, Extreme ultraviolet, Charge-coupled devices, Diffraction, Interferometers, Photomasks, Monochromatic aberrations

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Proceedings Article | 18 October 2004 Paper

Recent progress of EUV wavefront metrology in EUVA

Masanobu Hasegawa, Chidane Ouchi, Takayuki Hasegawa, Seima Kato, Akinori Ohkubo, Akiyoshi Suzuki, Katsumi Sugisaki, Masashi Okada, Katsura Otaki, Katsuhiko Murakami, Jun Saito, Masahito Niibe, Mitsuo Takeda

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.562431

KEYWORDS: Wavefronts, Extreme ultraviolet, Optical testing, Diffraction, Wavefront metrology, Interferometers, Shearing interferometers, Diffusion tensor imaging, Spherical lenses, Diffraction gratings

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Proceedings Article | 13 January 2004 Paper

Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL

Katsura Otaki, Yucong Zhu, Mikihiko Ishii, Shigeru Nakayama, Katsuhiko Murakami, Takashi Gemma

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.507046

KEYWORDS: Wavefronts, Mirrors, Point diffraction interferometers, Extreme ultraviolet lithography, Diffraction, Error analysis, Projection systems, Numerical simulations, Wavefront analysis, Computer simulations

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Proceedings Article | 1 July 2002 Paper

Aspherical mirror measurement using a point diffraction interferometer

Kazuya Ota, Takahiro Yamamoto, Yusuke Fukuda, Katsura Otaki, Iwao Nishiyama, Shinji Okazaki

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472343

KEYWORDS: Mirrors, Extreme ultraviolet, Error analysis, Spherical lenses, Point diffraction interferometers, Projection systems, Distance measurement, Interferometry, Wavefronts, Aspheric lenses

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Proceedings Article | 20 August 2001 Paper

Impact of the EUV mask phase response on the asymmetry of Bossung curves as predicted by rigorous EUV mask simulations

Christof Krautschik, Masaaki Ito, Iwao Nishiyama, Katsura Otaki

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436666

KEYWORDS: Photomasks, Extreme ultraviolet, Binary data, Reflectivity, Phase shifting, Scattering, Finite element methods, Mirrors, Tantalum, Coherence (optics)

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Proceedings Article | 20 August 2001 Paper

Advanced point diffraction interferometer for EUV aspherical mirrors

Kazuya Ota, Takahiro Yamamoto, Yusuke Fukuda, Katsura Otaki, Iwao Nishiyama, Shinji Okazaki

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436686

KEYWORDS: Mirrors, Extreme ultraviolet, Helium, Point diffraction interferometers, Interferometers, Wavefront aberrations, Objectives, Spherical lenses, Wavefronts, Phase shifting

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Proceedings Article | 28 June 1999 Paper

Polarization effect on signal from optical ROM using SIL

K. Otaki, Hisao Osawa, Hiroshi Ooki, Jun Saito

Proceedings Volume 3864, 386411 (1999) https://doi.org/10.1117/12.997571

KEYWORDS: Polarization, Diffraction, Imaging systems, Solids, Aluminum, Optical isolators, Wave plates, Head

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Proceedings Article | 28 June 1999 Paper

Grating-assisted superresolution for scanning optical systems

Hiroshi Ooki, Katsura Otaki, Hisao Osawa, Jun Saito

Proceedings Volume 3864, 38643E (1999) https://doi.org/10.1117/12.997640

KEYWORDS: Super resolution, Signal detection, Spatial frequencies, Optical storage, Moire patterns, Optical discs, Microscopy, Image resolution, Fringe analysis, Imaging systems

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Proceedings Article | 7 May 1999 Paper

Absolute measurement of a spherical surface using a point diffraction interferometer

Katsura Otaki, Florian Bonneau, Yutaka Ichihara

Proceedings Volume 3740, (1999) https://doi.org/10.1117/12.347755

KEYWORDS: Wavefronts, Monochromatic aberrations, Spherical lenses, Objectives, Mirrors, Point diffraction interferometers, Phase shifts, Error analysis, Wavefront aberrations, Surface finishing

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Proceedings Article | 23 October 1998 Paper

Simulation of readout signals with near-field SIL

Katsura Otaki, Takeshi Irita, Y. Tokoyoda, Hiroshi Ooki, Jun Saito

Proceedings Volume 3401, (1998) https://doi.org/10.1117/12.327932

KEYWORDS: Near field, Near field optics, Diffraction, Dielectric polarization, Detection theory, Reflectivity, Polarization, Tin, Crystals, Dielectrics

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Showing 5 of 15 publications

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