Dr. Kiho Yang Profile

Dr. Kiho Yang

at imec

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Author

Publications (3)

Proceedings Article | 12 November 2024 Presentation + Paper

Logic and memory patterning breakthrough using High-NA lithography

V. Blanco Carballo, S. Roy, B. Chowrira, T. Pham, J. Wouters, S. Das, S. Decoster, P. Leray, R. Liu, K. Ronse, G. Vandenberghe, A. Niroomand, P. Foubert, V. Rutigliani, H. Suh, M. Gupta, D. de Simone, M. Dusa, C. Beral, V. Philipsen, V. Wiaux, J. Franke, J. Bekaert, B. Baskaran, W. Gillijns, R. Kim, Y. Sherazi, H. Vats, M. Cupak, C. Chang, Y.-J. Lin, J. Lee, S. Hwang, K. Yang, K. Miyaguchi

Proceedings Volume 13216, 1321604 (2024) https://doi.org/10.1117/12.3047176

KEYWORDS: Metals, Optical lithography, Logic, Semiconducting wafers, Extreme ultraviolet lithography, Etching, Scanning electron microscopy, Lithography, Tin

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Proceedings Article | 10 April 2024 Poster + Paper

Single mask solution to pattern DRAM LILP layer at 42nm pitch using EUV CAR photoresist

Arijit Das, Kiho Yang, Toto Chen, Pierce Chang, Sheng-Tse Chen, Shu-De Gong, Hyo Seon Suh, Jeonghoon Lee, Jan-Frederik Finoulst, Chris Wilson, Paulina Rincon Delgadillo, Murat Pak

Proceedings Volume PC12953, PC129530Z (2024) https://doi.org/10.1117/12.3011854

KEYWORDS: Critical dimension metrology, Extreme ultraviolet lithography, Optical lithography, Line width roughness, Photoresist materials, Semiconducting wafers, Finite element methods, Printing, Inspection, Cadmium

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Proceedings Article | 10 April 2024 Presentation + Paper

Manufacturing-friendly curvilinear standard cell design

Ryoung-Han Kim, Apoorva Oak, Yasser Sherazi, Gioele Mirabelli, Soobin Hwang, Kiho Yang, Hsinlan Chang

Proceedings Volume 12954, 1295405 (2024) https://doi.org/10.1117/12.3009888

KEYWORDS: Design, Metals, Optical proximity correction, Semiconductors, Optical lithography, Photomasks, Logic, Standards development, Manufacturing, Transistors

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