Dr. Klaus-Peter Johnsen Profile

Dr. Klaus-Peter Johnsen

at GlobalFoundries

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 11 April 2024 Presentation + Paper

Pattern-based in-design fixing for improving design for manufacturability (DFM) rule compliance

Lynn T. Wang, Ariel de Jesus Reyes Ruiz, Teodora Nicolae, Ivan Tanev, Klaus-Peter Johnsen, David Villarreal, Fadi Batarseh

Proceedings Volume 12954, 1295410 (2024) https://doi.org/10.1117/12.3010901

KEYWORDS: Design for manufacturing, Metals, Design, Design rules, Manufacturing, Optical proximity correction, Image classification, Automation, Compliance, Design for manufacturability

Read Abstract +

Proceedings Article | 28 April 2023 Presentation + Paper

Design for manufacturability (DFM) physical verification using machine learning

Lynn T. Wang, Klaus-Peter Johnsen, Ivan Tanev, Fadi Batarseh, Chang Su, Pouya Rezaeifakhr, Uwe Paul Schroeder

Proceedings Volume 12495, 124951G (2023) https://doi.org/10.1117/12.2658646

KEYWORDS: Data modeling, Machine learning, Neural networks, Design and modelling, Design for manufacturing, Principal component analysis, Correlation coefficients, Singular value decomposition, Mathematical optimization, Lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years