Mr. Koji Suzuki Profile

Koji Suzuki

at Ushio Inc

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Author

Publications (2)

Proceedings Article | 13 November 2024 Poster

LDP EUV source performance and cost-of-ownership improvement

Yusuke Teramoto, Shunichi Morimoto, Teruaki Kawajiri, Koji Suzuki, Fuki Sato, Akihisa Nagano, Noritaka Ashizawa, Hidenori Watanabe, Kazuya Aoki, Yoshihiko Sato

Proceedings Volume PC13215, PC1321514 (2024) https://doi.org/10.1117/12.3036726

KEYWORDS: Extreme ultraviolet, Tunable filters, Plasma, Inspection, Extreme ultraviolet lithography, Tin, Reliability, Pulsed laser operation, Ions, EUV optics

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Proceedings Article | 21 November 2023 Paper

High-brightness LDP source

Masataka Mamizuka, Teruaki Kawajiri, Koji Suzuki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa, Kazuya Aoki, Yoshihiko Sato

Proceedings Volume 12750, 1275012 (2023) https://doi.org/10.1117/12.2687785

KEYWORDS: Plasma, Extreme ultraviolet, Extreme ultraviolet lithography, Tin, Reliability, Light sources, Electrodes

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