We report on the fabrication of the minimized conventional microoptical components out of the hybrid organic-
inorganic SZ2080 and SG4060 photoresins using laser direct writing technique. An ascending laser focus multiscan
approach is introduced as a method for the structuring of 2D nanolines. The diameters and heights of the
nanolines are comparable to the ones written with the electron beam lithography. Using our proposed laser
direct writing approach one can write 3D microstructures with the 2D nanofeatures in a single step procedure.
As demonstration of this technology, microlenses with 1D, 2D and circular transmission gratings were fabricated.
Additionally, for the rst time, ISO certied laser-induced damage testing was applied to determine the optical
breakdown threshold of the SZ2080 photoresin used for the laser direct writing.
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