Mr. Ku Fang Profile

Ku Fang

at Cadence Design Systems Inc

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Publications (1)

Proceedings Article | 26 May 2022 Poster + Paper

Using pattern analysis to improve wafer inspection flow

Hung-yu Lin, Ethan Wang, Jason Sweis, Philippe Hurat, Ya-Chieh Lai, Yu-Chin Pai, Ku Fang, Chin-Juan Li, Chia Wei Huang, Jun-Ming Chen, Yung-Feng Cheng

Proceedings Volume 12053, 120531T (2022) https://doi.org/10.1117/12.2613620

KEYWORDS: Inspection, Semiconducting wafers, Wafer inspection, Image classification, Yield improvement, Defect inspection, Data analysis, Software development, Defect detection, Tolerancing

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