Laser 3D nanolithography as an additive manufacturing technology allows the fabrication of various objects at a micro-scale, with possible nano-scale single features. An absorption mechanism plays the key role, thus polymerization reaction starts only at a certain value of light intensity I, which also alters because of possible different non-linearities of light-matter interaction when different wavelengths are used. Both polymerization and optical damage thresholds and the feature size depend on the applied I and energy dose E. In this work, the experiment was performed within the 700-1250 nm wavelength range while varying pulse duration (~ 100-300 fs). We present how the polymerization process (thresholds and feature sizes) depends on both wavelength and pulse duration in the SZ2080TM prepolymer.
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