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Dr. Lifeng Wu
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Publications (1)
Proceedings Article | 21 October 2009 Paper
A new digital silicon MEMS gyroscope
L. F. Wu, Zh. Peng, Wei Zhang, F. X. Zhang
Proceedings Volume 7493, 74935X (2009) https://doi.org/10.1117/12.839936
KEYWORDS: Gyroscopes, Signal processing, Silicon, Microelectromechanical systems, Digital electronics, Sensors, Capacitance, Structural sensing, Copper, Capacitors
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