Dr. Longfei Shen Profile

Dr. Longfei Shen

at ASML Netherlands BV

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Author

Publications (3)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

An accurate and robust after-develop overlay measurement solution using YieldStar multi-wavelength optical metrology accompanied by a precise application strategy

Pengzhen Zhang, Kai You, Pandeng Xuan, Yaobin Feng, Longfei Shen, Jolly Xu, Ji-Ling Hou, Saravana Prakash Shanmugasundaram, Summer Sui, Shiwei Ren, Chengkun Li, Jerry Fang, Toby Yu, Babak Mozooni

Proceedings Volume 11611, 116112U (2021) https://doi.org/10.1117/12.2583737

KEYWORDS: Overlay metrology, Optical metrology, Metrology, Lithography, High volume manufacturing, Etching, Diffraction

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM

Chia Hung Chen, Sheng-Tsung Tsao, Jie Du, Wenkang Song, Hongwei Zhu, Ji-Ling Hou, Longfei Shen, Sunny Xia, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Kimi Yang, Xing Ma, Zhi-Qiang Tang, Jing Wang, Yu Liu, David Xu, Herman Heijmerikx, Eason Su, Elliott Mc Namara, Kaustuve Bhattacharyya

Proceedings Volume 11611, 116112Z (2021) https://doi.org/10.1117/12.2583818

KEYWORDS: Metrology, Overlay metrology, High volume manufacturing, Front end of line, Detection and tracking algorithms

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Proceedings Article | 20 March 2020 Paper

Enhancing the applications space of diffraction based overlay metrology by increasing throughput and target pitch flexibility

Simon Mathijssen, Herman Heijmerikx, Farzad Farhadzadeh, Marc Noot, Lineke van der Sneppen, Longfei Shen, Fei Jia, Jolly Xu, Huajun Qin, Arie den Boef, Elliott Mc Namara, Kaustuve Bhattacharyya, Chao Fang, Yaobin Feng

Proceedings Volume 11325, 113252L (2020) https://doi.org/10.1117/12.2551899

KEYWORDS: Diffraction, Overlay metrology, Metrology, Diffraction gratings, Semiconducting wafers, Polarization, Silicon, Detection and tracking algorithms

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