Luc Voruz
at cosine measurement systems
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 21 August 2024 Poster + Paper
Proceedings Volume 13093, 130934R (2024) https://doi.org/10.1117/12.3019866
KEYWORDS: Mirrors, X-ray optics, Silicon, Metrology, X-rays, Wafer level optics, Semiconducting wafers, Inspection, Robots, Optical surfaces

Proceedings Article | 21 August 2024 Presentation + Paper
Proceedings Volume 13093, 1309319 (2024) https://doi.org/10.1117/12.3019675
KEYWORDS: Mirrors, X-rays, X-ray optics, Silicon, Semiconducting wafers, Optical benches, Spatial resolution, Optics manufacturing, X-ray telescopes, Robots

Proceedings Article | 22 November 2023 Poster
Boris Landgraf, Nicolas Barrière, Alex Bayerle, Maximilien Collon, David Girou, Laurens Keek, Adam Lassise, Giuseppe Vacanti, Aniket Thete, Ramses Gunther, Christian Koernig, Mark Vervest, Luc Voruz
Proceedings Volume PC12750, PC127500W (2023) https://doi.org/10.1117/12.2687643
KEYWORDS: Silicon, Wafer-level optics, X-ray optics, Optics manufacturing, X-rays, Semiconducting wafers, X-ray technology, Surface roughness, Mirrors, Space mirrors

Proceedings Article | 5 October 2023 Presentation + Paper
Proceedings Volume 12679, 1267903 (2023) https://doi.org/10.1117/12.2678106
KEYWORDS: Mirrors, Silicon, X-ray optics, Semiconducting wafers, Wafer-level optics, X-rays, Synchrotron radiation, Ion beam finishing, Mirror surfaces, Laser cutting

Proceedings Article | 12 July 2023 Open Access Paper
Proceedings Volume 12777, 127770R (2023) https://doi.org/10.1117/12.2689003
KEYWORDS: Mirrors, Silicon, X-rays, Semiconducting wafers, Optics manufacturing, X-ray optics, Robots, Astronomical imaging, Wafer-level optics, Space mirrors

Showing 5 of 18 publications
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