Luizetta V. Navrazhnykh
at Caltech
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 March 2021 Presentation
Andrew Friedman, Seyedeh Mahsa Kamali, Seola Lee, Tianzhe Zheng, Luizetta Elliott, Phillippe Pearson, Andrei Faraon, Julia Greer
Proceedings Volume 11677, 116770X (2021) https://doi.org/10.1117/12.2583224
KEYWORDS: Lithography, Photoresist materials, Additive manufacturing, Nanolithography, Optical lithography, Chemistry, Absorption, Visible radiation, Silicon, Raster graphics

Proceedings Article | 10 March 2020 Presentation
Proceedings Volume 11289, 112890I (2020) https://doi.org/10.1117/12.2555112

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