Dr. Lukasz Urbanski Profile

Dr. Lukasz Urbanski

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Publications (8)

Proceedings Article | 27 September 2013 Paper

Coherent nanopatterning with table-top soft x-ray lasers

W. Li, V. Martinez Esquiroz, D. Patel, L. Urbanski, C. Menoni, J. Rocca, A. Stein, W. Chao, E. Anderson, M. Marconi

Proceedings Volume 8849, 88490W (2013) https://doi.org/10.1117/12.2024472

KEYWORDS: Photomasks, Lithography, Nanolithography, Nanostructures, X-ray lasers, Photoresist materials, Extreme ultraviolet, Coherence imaging, Printing, Imaging systems

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Proceedings Article | 5 October 2011 Paper

Line width measurement of a capillary discharge soft x-ray laser

L. Urbanski, L. Meng, M. Marconi, M. Berril, O. Guilbaud, A. Klisnick, J. Rocca

Proceedings Volume 8140, 81400Y (2011) https://doi.org/10.1117/12.892929

KEYWORDS: Capillaries, X-ray lasers, Visibility, Interferometers, Mirrors, Plasmas, Temporal coherence, Laser applications, Solids, Argon

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Proceedings Article | 5 October 2011 Paper

Table top nanopatterning by de-magnified Talbot effect using a capillary discharge soft x-ray laser

L. Urbanski, P. Wachulak, A. Isoyan, C. Menoni, J. Rocca, M. Marconi

Proceedings Volume 8140, 81400T (2011) https://doi.org/10.1117/12.892855

KEYWORDS: Photomasks, Mirrors, Spherical lenses, Capillaries, X-ray lasers, Photoresist materials, Extreme ultraviolet, Nanostructures, Photography, Diffraction

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Proceedings Article | 15 December 2010 Paper

Nanometer scale imaging with table top extreme ultraviolet sources

Przemyslaw Wachulak, Richard Sandberg, Artak Isoyan, Lukasz Urbanski, Andrzej Bartnik, Randy Bartels, Carmen Menoni, Henryk Fiedorowicz, Jorge Rocca, Mario Marconi

Proceedings Volume 7746, 774609 (2010) https://doi.org/10.1117/12.880340

KEYWORDS: Extreme ultraviolet, Holograms, Spatial resolution, Diffraction, Image resolution, Holography, 3D image reconstruction, Photoresist materials, Photomasks, Microscopes

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Proceedings Article | 29 September 2009 Paper

Tabletop soft x-ray lithography

M. Marconi, P. Wachulak, L. Urbanski, Artak Isoyan, Fan Jiang, Yang Chun Cheng, J. Rocca, C. Menoni, F. Cerrina

Proceedings Volume 7451, 74510J (2009) https://doi.org/10.1117/12.825509

KEYWORDS: Capillaries, Holography, Lithography, Photoresist materials, Printing, Nanostructures, Photomasks, Interferometry, X-ray lithography, Coherence imaging

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SPIE Journal Paper | 1 April 2009

New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers

Przemyslaw Wachulak, Lukasz Urbanski, Maria Capeluto, D. Hill, Willie Rockward, Claudio Iemmi, Erik Anderson, Carmen Menoni, Jorge Rocca, Mario Marconi

JM3, Vol. 8, Issue 02, 021206, (April 2009) https://doi.org/10.1117/12.10.1117/1.3129837

KEYWORDS: Extreme ultraviolet, Interferometry, Lithography, Interferometers, Mirrors, Diffraction gratings, Wavefronts, Extreme ultraviolet lithography, Capillaries, Synchrotrons

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Proceedings Article | 18 March 2009 Paper

Extreme ultraviolet holographic lithography with a table-top laser

A. Isoyan, F. Jiang, Y.-C. Cheng, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, M. Marconi, F. Cerrina

Proceedings Volume 7271, 72713O (2009) https://doi.org/10.1117/12.814678

KEYWORDS: Computer generated holography, Extreme ultraviolet, Lithography, Photomasks, Holography, Photoresist materials, Extreme ultraviolet lithography, 3D image reconstruction, Image resolution, Nanolithography

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Proceedings Article | 28 December 2007 Paper

Numerical solution of tissue laser welding problem

Łukasz Urbański, Dariusz Podniesiński, Andrzej Zając

Proceedings Volume 6937, 693726 (2007) https://doi.org/10.1117/12.784720

KEYWORDS: Laser therapeutics, Anisotropy, Particles, Tissue optics, Laser tissue interaction, Absorption, Tissues, Laser scattering, Scattering, Monte Carlo methods

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Showing 5 of 8 publications

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