Prof. Lynford L. Goddard Profile

Prof. Lynford L. Goddard

Professor at Univ of Illinois

SPIE Involvement:

Author

Publications (20)

Proceedings Article | 30 June 2022 Open Access

Pre-college students learn cross-cutting STEM concepts by building an optical imaging projector

Aditi Udupa, Lynford Goddard

Proceedings Volume 12297, 122972N (2022) https://doi.org/10.1117/12.2635598

KEYWORDS: Projection systems, Scanning transmission electron microscopy, Optical imaging, Photonics, Mathematics, Education and training, Visualization, Transparency, Ray tracing, Projection devices

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 23 June 2021 Presentation

Detecting nanoscale perturbations using new forms of optical microscopy

Lynford Goddard

Proceedings Volume 11783, 1178303 (2021) https://doi.org/10.1117/12.2597062

Read Abstract +

Proceedings Article | 13 March 2018 Presentation + Paper

Defect inspection using a time-domain mode decomposition technique

Jinlong Zhu, Lynford Goddard

Proceedings Volume 10585, 1058508 (2018) https://doi.org/10.1117/12.2297443

KEYWORDS: Semiconducting wafers, Defect inspection, Signal to noise ratio, Inspection, Near field optics, Wafer-level optics, Silicon, Scanning electron microscopy, Defect detection, Microscopes

Read Abstract +

Proceedings Article | 8 March 2016 Paper

Electromagnetic field modeling for defect detection in 7 nm node patterned wafers

Jinlong Zhu, Kedi Zhang, Nima Davoudzadeh, Xiaozhen Wang, Lynford Goddard

Proceedings Volume 9778, 97780P (2016) https://doi.org/10.1117/12.2218979

KEYWORDS: Silicon, Electromagnetism, Semiconducting wafers, Defect inspection, Defect detection, Wafer-level optics, Inspection, Computer simulations, Scattering, Bridges, Signal detection, Polarization, Imaging systems, Near field optics

Read Abstract +

Proceedings Article | 8 March 2016 Paper

Generalized measurement configuration optimization for accurate reconstruction of periodic nanostructures using optical scatterometry

Jinlong Zhu, Yating Shi, Shiyuan Liu, Lynford Goddard

Proceedings Volume 9778, 977823 (2016) https://doi.org/10.1117/12.2218988

KEYWORDS: Process control, Wafer-level optics, Scatterometry, Metrology, Nanostructures, Error analysis, Silicon, Optical testing, Inverse optics, Inverse problems, Scatter measurement

Read Abstract +

Proceedings Article | 19 March 2015 Open Access

9nm node wafer defect inspection using three-dimensional scanning, a 405nm diode laser, and a broadband source

Renjie Zhou, Chris Edwards, Casey Bryniarski, Gabriel Popescu, Lynford Goddard

Proceedings Volume 9424, 942416 (2015) https://doi.org/10.1117/12.2085683

KEYWORDS: Semiconducting wafers, Defect inspection, Interferometry, Imaging systems, Defect detection, Particles, Inspection, Light sources, Laser interferometry, Speckle

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 11 March 2015 Open Access

White-light interferometric microscopy for wafer defect inspection

Renjie Zhou, Christopher Edwards, Casey Bryniarski, Marjorie Dallmann, Gabriel Popescu, Lynford Goddard

Proceedings Volume 9336, 93362P (2015) https://doi.org/10.1117/12.2079660

KEYWORDS: Semiconducting wafers, Defect inspection, Phase imaging, Inspection, Interferometry, Spatial coherence, Diffraction, Microscopy, Spatial light modulators, Linear filtering

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 11 March 2015 Open Access

Quantitative phase imaging with programmable illumination

Taewoo Kim, Chris Edwards, Lynford Goddard, Gabriel Popescu

Proceedings Volume 9336, 93361F (2015) https://doi.org/10.1117/12.2079981

KEYWORDS: Projection systems, Imaging systems, Spatial light modulators, Microscopy, Phase contrast, Microscopes, Phase imaging, Signal attenuation, Phase shifts, Objectives

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 11 March 2015 Open Access

Semiconductor defect metrology using laser-based quantitative phase imaging

Renjie Zhou, Chris Edwards, Gabriel Popescu, Lynford Goddard

Proceedings Volume 9336, 93361I (2015) https://doi.org/10.1117/12.2078329

KEYWORDS: Semiconducting wafers, Semiconductor lasers, Defect inspection, Optical isolators, Defect detection, Semiconductors, Phase imaging, Microscopy, Metrology, Diffraction

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 11 March 2015 Open Access

Quantitative phase-shifting DIC using programmable spatial light modulators

Tan Nguyen, Chris Edwards, Lynford Goddard, Gabriel Popescu

Proceedings Volume 9336, 93360P (2015) https://doi.org/10.1117/12.2080370

KEYWORDS: Digital image correlation, Spatial light modulators, Phase shifts, Microscopes, Polarization, Modulation, Imaging systems, Coherence (optics), Microscopy, Wave plates

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 11 March 2015 Open Access

Halo-free quantitative phase imaging with partially coherent light

Tan Nguyen, Hassaan Majeed, Christopher Edwards, Minh Do, Lynford Goddard, Gabriel Popescu

Proceedings Volume 9336, 93360N (2015) https://doi.org/10.1117/12.2080358

KEYWORDS: Phase imaging, Phase measurement, Microscopy, Systems modeling, Blood, Computer engineering, Diffraction, Imaging systems, Image acquisition, Interferometry

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 11 March 2015 Open Access

Phase correction in low coherence diffraction phase microscopy using the optical transfer function

Chris Edwards, Gabriel Popescu, Lynford Goddard

Proceedings Volume 9336, 933610 (2015) https://doi.org/10.1117/12.2080318

KEYWORDS: Optical transfer functions, Microscopy, Diffraction, Spatial coherence, Coherence (optics), Image acquisition, Deconvolution, Optical microscopy, Objectives, Spatial filters

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 11 March 2015 Open Access

In-situ measurements of nanoscale phenomena using diffraction phase microscopy

Chris Edwards, Steven McKeown, Suk-Won Hwang, Paul Froeter, Xiuling Li, John Rogers, Gabriel Popescu, Lynford Goddard

Proceedings Volume 9336, 93361K (2015) https://doi.org/10.1117/12.2080253

KEYWORDS: Hydrogen, Microscopy, Palladium, Silicon, Diffraction, Imaging systems, Etching, Phase imaging, Scanning electron microscopy, Image processing

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 2 April 2014 Open Access

9nm node wafer defect inspection using visible light

Renjie Zhou, Chris Edwards, Gabriel Popescu, Lynford Goddard

Proceedings Volume 9050, 905017 (2014) https://doi.org/10.1117/12.2046451

KEYWORDS: Semiconducting wafers, Bridges, Inspection, Convolution, Defect detection, Optical filters, Image processing, Defect inspection, Image filtering, Wafer inspection

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 10 April 2013 Open Access

22 nm node wafer inspection using diffraction phase microscopy and image post-processing

Renjie Zhou, Gabriel Popescu, Lynford Goddard

Proceedings Volume 8681, 86810G (2013) https://doi.org/10.1117/12.2011216

KEYWORDS: Semiconducting wafers, Bridges, Defect detection, Microscopy, Image filtering, Diffraction, Calibration, Interference (communication), Wafer inspection, Panoramic photography

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 7 February 2012 Paper

Mode suppression in metal filled photonic crystal vertical cavity lasers

Benjamin Griffin, Amir Arbabi, Lynford Goddard

Proceedings Volume 8276, 82760N (2012) https://doi.org/10.1117/12.912552

KEYWORDS: Metals, Vertical cavity surface emitting lasers, Chromium, Mirrors, Photonic crystals, Palladium, Refractive index, Laser crystals, Optical simulations, Gallium arsenide

Read Abstract +

Proceedings Article | 8 February 2011 Paper

Modeling of compact Pd coated VCSELs for hydrogen sensing

Chris Edwards, Lynford Goddard

Proceedings Volume 7952, 79520E (2011) https://doi.org/10.1117/12.874235

KEYWORDS: Vertical cavity surface emitting lasers, Hydrogen, Palladium, Quantum wells, Reflectivity, Absorption, Sensors, Mirrors, Optical pumping, Neodymium

Read Abstract +

Proceedings Article | 12 October 2006 Paper

Rapidly reconfigurable all-optical universal logic gates

Lynford Goddard, Jeffrey Kallman, Tiziana Bond

Proceedings Volume 6368, 63680H (2006) https://doi.org/10.1117/12.686169

KEYWORDS: Mirrors, Reflectivity, Quantum wells, Logic, Refractive index, Constructive interference, Waveguides, Logic devices, Brain-machine interfaces, Analog electronics

Read Abstract +

Proceedings Article | 18 November 2005 Paper

Imaging with a terahertz quantum cascade laser for biomedical applications

Seongsin Kim, Fariba Hatami, Allison Kurian, Lynford Goddard, James Ford, James Harris, Giacomo Scalari, Marcella Giovannini, Nicolas Hoyler, Jerome Faist, Geoff Harris

Proceedings Volume 6010, 60100I (2005) https://doi.org/10.1117/12.630999

KEYWORDS: Terahertz radiation, Tissues, Quantum cascade lasers, Liver, Absorption, Brain, Neuroimaging, Tumors, Bone, FT-IR spectroscopy

Read Abstract +

Proceedings Article | 1 April 2005 Paper

High-performance GaInNAsSb/GaAs lasers at 1.5 um

Lynford Goddard, Seth Bank, Mark Wistey, Homan Yuen, James Harris

Proceedings Volume 5738, (2005) https://doi.org/10.1117/12.591447

KEYWORDS: Resistance, Continuous wave operation, Laser damage threshold, Neodymium, Gallium arsenide, External quantum efficiency, Temperature metrology, Reliability, Semiconducting wafers

Read Abstract +

Showing 5 of 20 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years