Dr. Maarten J. Jansen Profile

Dr. Maarten J. Jansen

at ASML Netherlands BV

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Author

Publications (3)

Proceedings Article | 17 April 2014 Paper

Progress on EUV pellicle development

Carmen Zoldesi, Kursat Bal, Brian Blum, Guus Bock, Derk Brouns, Florian Dhalluin, Nina Dziomkina, Juan Diego Arias Espinoza, Joost de Hoogh, Silvester Houweling, Maarten Jansen, Mohammad Kamali, Alain Kempa, Ronald Kox, Robert de Kruif, Jorge Lima, Yang Liu, Henk Meijer, Hans Meiling, Ijen van Mil, Marco Reijnen, Luigi Scaccabarozzi, Daniel Smith, Beatrijs Verbrugge, Laurens de Winters, Xugang Xiong, John Zimmerman

Proceedings Volume 9048, 90481N (2014) https://doi.org/10.1117/12.2049276

KEYWORDS: Pellicles, Extreme ultraviolet, Semiconducting wafers, Reticles, Prototyping, Silicon, Manufacturing, Particles, Critical dimension metrology, Protactinium

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Proceedings Article | 26 February 2004 Paper

Scanning wafer thickness and flatness interferometer

Maarten Jansen, Han Haitjema, Peter Schellekens

Proceedings Volume 5252, (2004) https://doi.org/10.1117/12.515650

KEYWORDS: Semiconducting wafers, Interferometers, Calibration, Optical alignment, Distance measurement, Mirrors, Distortion, Phase shifts, Phase measurement, Metrology

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Proceedings Article | 20 November 2003 Paper

Improving a commercially available heterodyne laser interferometer to sub-nm uncertainty

Han Haitjema, Suzanne Cosijns, N. Roset, Maarten Jansen

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.508542

KEYWORDS: Interferometers, Mirrors, Heterodyning, Polarization, Signal detection, Beam splitters, Receivers, Calibration, Optical amplifiers, Phase measurement

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