Mr. Maik Lano Profile

Maik Lano

at Friedrich-Alexander-Univ Erlangen-Nürnberg

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 25 April 2008 Paper

Wave-optical simulation of a grating lateral shearing interferometer with a periodic incoherent light source

Norbert Lindlein, Sarina Wunderlich, Irina Harder, Klaus Mantel, Maik Lano, Johannes Schwider

Proceedings Volume 6994, 699407 (2008) https://doi.org/10.1117/12.783245

KEYWORDS: Light sources, Diffraction, Diffraction gratings, Wave propagation, Shearing interferometers, Sensors, Optical components, Free space, Light wave propagation, Roentgenium

Read Abstract +

Proceedings Article | 1 September 2004 Paper

Homogenization and beam shaping with microlens arrays

Irina Harder, Maik Lano, Norbert Lindlein, Johannes Schwider

Proceedings Volume 5456, (2004) https://doi.org/10.1117/12.549015

KEYWORDS: Light sources, Microlens array, Sensors, Light emitting diodes, Microlens, Homogenization, Beam shaping, Lithography, Diffraction, Spatial coherence

Read Abstract +

Proceedings Article | 30 July 2002 Paper

Lateral shearing interferometer for phase-shift mask measurement at 193 nm

Gerald Fuetterer, M. Lano, Norbert Lindlein, Johannes Schwider

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474601

KEYWORDS: Phase shifts, Light sources, Photomasks, Shearing interferometers, Phase measurement, Interferometers, Diffraction gratings, Wavefronts, Diffraction, Superposition

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years