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Dr. Maria Jose Cadena Vinueza
at Bruker Corp
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Author
Publications (5)
Proceedings Article | 21 November 2023 Presentation + Paper
AFM nanomachining and clean repair of EUV TaBN advanced absorber material
Proceedings Volume 12751, 1275106 (2023) https://doi.org/10.1117/12.2686868
KEYWORDS: Extreme ultraviolet, Contamination, Photomasks, Atomic force microscopy, Mask cleaning, Particles, Autoregressive models, Error analysis, Statistical analysis, Metrology
Proceedings Article | 29 September 2023 Paper
AFM clean and nanomachining repair technology for future mask nodes
Proceedings Volume 12915, 1291503 (2023) https://doi.org/10.1117/12.2684791
KEYWORDS: Extreme ultraviolet, Atomic force microscopy, Particles, Photomasks, Mask cleaning, Autoregressive models, Ruthenium, Contamination, Printing
Proceedings Article | 1 December 2022 Presentation + Paper
AFM clean and nanomachining repair technology for future mask nodes
Proceedings Volume 12293, 1229304 (2022) https://doi.org/10.1117/12.2641799
KEYWORDS: Extreme ultraviolet, Atomic force microscopy, Particles, Photomasks, Scanning electron microscopy, Nanotechnology, Ruthenium, Manufacturing, Deep ultraviolet, Optical lithography
Proceedings Article | 13 October 2020 Poster + Presentation + Paper
Tip wear improvements in advanced nanomachining
Proceedings Volume 11518, 1151811 (2020) https://doi.org/10.1117/12.2573094
KEYWORDS: Chemistry, Molecular machines, Extreme ultraviolet
Proceedings Article | 13 October 2020 Presentation + Paper
Next generation nanomachining process technologies
Proceedings Volume 11518, 115180C (2020) https://doi.org/10.1117/12.2573093
KEYWORDS: Nanotechnology, Photomasks, Edge detection, Edge roughness
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