Mr. Mark McNie Profile

Mark McNie

Principal MEMS Engineer

SPIE Involvement:

Author

Area of Expertise:

MEMS , Optics , Semiconductors

Publications (26)

Proceedings Article | 8 September 2011 Paper

Paper

Establishing a MOEMS process to realise microshutters for coded aperture imaging applications

Mark McNie, Rhodri Davies, Ashley Johnson, Nicola Price, Charlotte Bennett, Christopher Slinger, Busbee Hardy, Greg Hames, Demaul Monk, Stanley Rogers

Proceedings Volume 8165, 81651D (2011) https://doi.org/10.1117/12.895510

KEYWORDS: Microopto electromechanical systems, Coded aperture imaging, Imaging systems, Mirrors, Electrodes, Mid-IR, Manufacturing, Microelectromechanical systems, Oxides, Doping

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Proceedings Article | 8 September 2011 Open Access

Open Access

Paper

An adaptive coded aperture imager: building, testing and trialing a super-resolving terrestrial demonstrator

Christopher Slinger, Charlotte Bennett, Gavin Dyer, Kevin Gilholm, Neil Gordon, David Huckridge, Mark McNie, Richard Penney, Ian Proudler, Kevin Rice, Kevin Ridley, Lee Russell, Geoffrey de Villiers, Philip Watson

Proceedings Volume 8165, 816511 (2011) https://doi.org/10.1117/12.895435

KEYWORDS: Point spread functions, Imaging systems, Sensors, Staring arrays, Super resolution, Optical design, Image resolution, Coded aperture imaging, Calibration, Image processing

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Proceedings Article | 28 August 2010 Paper

Paper

A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

Mark McNie, Alan Brown, David King, Gilbert Smith, Neil Gordon, Stephen Riches, Stanley Rogers

Proceedings Volume 7818, 78180G (2010) https://doi.org/10.1117/12.860436

KEYWORDS: Microopto electromechanical systems, Imaging systems, Mid-IR, Mirrors, Coded aperture imaging, Photomasks, Sensors, Modulation, Modulators, Coded apertures

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Proceedings Article | 28 August 2010 Paper

Paper

Tracking point targets at sub-pixel accuracy in adaptive coded aperture imagery without decoding

Kevin Gilholm, Christopher Slinger, Neil Gordon, Kevin Ridley, Helen Bennett, Mark McNie

Proceedings Volume 7818, 781808 (2010) https://doi.org/10.1117/12.861150

KEYWORDS: Detection and tracking algorithms, Coded apertures, Staring arrays, Point spread functions, Imaging systems, Sensors, Particles, Particle filters, Coded aperture imaging, Solids

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Proceedings Article | 28 August 2010 Paper

Paper

An experimental infrared sensor using adaptive coded apertures for enhanced resolution

Neil Gordon, Geoffrey de Villiers, Kevin Ridley, Charlotte Bennett, Mark McNie, Ian Proudler, Lee Russell, Christopher Slinger, Kevin Gilholm

Proceedings Volume 7818, 781806 (2010) https://doi.org/10.1117/12.860802

KEYWORDS: Point spread functions, Microopto electromechanical systems, Image resolution, Sensors, Imaging systems, Photomasks, Infrared imaging, Infrared cameras, Image enhancement, Infrared sensors

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Proceedings Article | 14 May 2010 Paper

Paper

LTCC-based differential photo acoustic cell for ppm gas sensing

P. Karioja, K. Keränen, K. Kautio, J. Ollila, M. Heikkinen, I. Kauppinen, T. Kuusela, B. Matveev, M. McNie, R. Jenkins, J. Palve

Proceedings Volume 7726, 77260H (2010) https://doi.org/10.1117/12.851854

KEYWORDS: Silicon, Sensors, Interferometers, Photoacoustic spectroscopy, Sapphire, Absorption, Gas sensors, Glasses, Reflectivity, Waveguides

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Silicon MEMS cantilever-based photoacoustic technology allows for the sensing of ultra low gas concentrations with very wide dynamic range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement is probed with an optical interferometer providing a pico-meter resolution. In the gas sensor, the silicon cantilever microphone is placed in a two-chamber differential gas cell. By monitoring differential pressure changes between the two chambers, the differential cell operates as a differential infra-red detector for optical absorption signals through a measurement and reference path. The differential pressure signal is proportional to gas concentration in the optical measurement path. We have designed, implemented and tested a differential photo acoustic gas cell based on Low Temperature Co-fired Ceramic (LTCC) multilayer substrate technology. Standard LTCC technology enables implementation of 2.5D structures including holes, cavities and channels into the electronic substrate. The implemented differential photoacoustic gas cell structure includes two 10 mm long cylindrical cells, diameter of 2.4 mm. Reflectance measurements of the cell showed that reflectivity of the substrate material can be improved by a factor 15 - 90 in the 3 - 8 μm spectral region using gold or silver paste coatings. A transparent window is required in the differential gas cell structure in order to probe the displacement of the silicon cantilever. The transparent sapphire window was sealed to the LTCC substrate using two methods: screen printed Au80/Sn20 solder paste and pre-attached glass solder paste (Diemat DM2700P/H848). Both methods were shown to provide hermetic sealing of sapphire windows to LTCC substrate. The measured He-leak rate for the 10 sealed test samples implemented using glass paste were less than 2.0 ×10^-9 atm×cm³/s, which meets the requirement for the leak rate according to MIL-STD 883. The achieved hermetic level suggests that the proof-of-principle packaging demonstrator paves the way for implementing a novel differential photoacoustic gas cell for a future miniature gas sensor module. The future module consisting of a sample gas cell and immersion lens IR-LEDs together with interferometric probing of the cantilever microphone is expected to be capable of measuring ultra low concentrations of a wide range of gases with their fundamental absorption bands at 3 - 7 μm wavelength, such as CO, CO2 and CH₄.

Proceedings Article | 24 February 2010 Paper

Paper

Differential photo-acoustic gas cell based on LTCC for ppm gas sensing

K. Keränen, K. Kautio, J. Ollila, M. Heikkinen, I. Kauppinen, T. Kuusela, B. Matveev, M. McNie, R. Jenkins, P. Karioja

Proceedings Volume 7607, 760714 (2010) https://doi.org/10.1117/12.841363

KEYWORDS: Sensors, Silicon, Photoacoustic spectroscopy, Interferometers, Sapphire, Gas sensors, Light emitting diodes, Waveguides, Reflectivity, Absorption

Read Abstract +

Silicon MEMS cantilever-based photoacoustic technology allows for the sensing of ultra low gas concentrations with very wide dynamic range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement is probed with an optical interferometer providing a pico-meter resolution. In the gas sensor, the silicon cantilever microphone is placed in a two-chamber differential gas cell. By monitoring differential pressure changes between the two chambers, the differential cell operates as a differential infra-red detector for optical absorption signals through a measurement and reference path. The differential pressure signal is proportional to gas concentration in the optical measurement path. We have designed, implemented and tested a differential photo-acoustic gas cell based on Low Temperature Co-fired Ceramic (LTCC) multilayer substrate technology. Standard LTCC technology enables implementation of 2.5D structures including holes, cavities and channels into the electronic substrate. The implemented differential photoacoustic gas cell structure includes two 10 mm long cylindrical cells, diameter of 2.4 mm. Reflectance measurements of the cell showed that reflectivity of the substrate material can be improved by a factor 15 - 90 in the 3 - 8 μm spectral region using gold or silver paste coatings. A transparent window is required in the differential gas cell structure in order to probe the displacement of the silicon cantilever. The transparent sapphire window was sealed to the LTCC substrate using two methods: screen printed Au80/Sn20 solder paste and pre-attached glass solder paste (Diemat DM2700P/H848). Both methods were shown to provide hermetic sealing of sapphire windows to LTCC substrate. The measured He-leak rate for the 10 sealed test samples implemented using glass paste were under 2.0 ×10^-9 atm×cm3/s, which meets the requirement for the leak rate according to MIL-STD 883. The achieved hermeticity level suggests that the proof-of-principle packaging demonstrator paves the way for implementing a novel differential photoacoustic gas cell for a future miniature gas sensor module. The future module consisting of a sample gas cell and immersion lens IR LEDs together with interferometric probing of the cantilever microphone is expected to be capable of measuring ultra low concentrations of a wide range of gases with their fundamental absorption bands at 3 - 7 μm wavelength, such as CO, CO₂ and CH₄.

Proceedings Article | 25 September 2009 Paper

Paper

Retro-reflective communications over a kilometre range using a MEMS-based optical tag

Andrew Scott, Kevin Ridley, David Jones, Mark McNie, Gilbert Smith, Kevin Brunson, Andrew Lewin, Keith Lewis

Proceedings Volume 7480, 74800L (2009) https://doi.org/10.1117/12.835073

KEYWORDS: Modulators, Modulation, Micromirrors, Sensors, Logic, Silicon, Telecommunications, Fabry–Perot interferometers, Microelectromechanical systems, Signal detection

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Proceedings Article | 25 August 2009 Paper

Paper

A scalable multi-chip architecture to realise large-format microshutter arrays for coded aperture applications

Mark McNie, David King, Gilbert Smith, Steven Stone, Alan Brown, Neil Gordon, Christopher Slinger, Kevin Cannon, Stephen Riches, Stanley Rogers

Proceedings Volume 7468, 74680E (2009) https://doi.org/10.1117/12.829105

KEYWORDS: Microopto electromechanical systems, Mirrors, Mid-IR, Imaging systems, Silicon, Fabry–Perot interferometers, Coded aperture imaging, Microelectromechanical systems, Coded apertures, Semiconducting wafers

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Proceedings Article | 19 February 2009 Paper

Paper

Large area transmissive modulator for a remotely interrogated MEMS-based optical tag

Mark McNie, Andrew Scott, Nicola Price, David Combes, Gilbert Smith, Kevin Ridley, Kevin Brunson, David Jones, Keith Lewis

Proceedings Volume 7208, 720806 (2009) https://doi.org/10.1117/12.809199

KEYWORDS: Modulators, Mirrors, Retroreflectors, Silicon, Modulation, Microopto electromechanical systems, Switching, Fabry–Perot interferometers, Surface micromachining, Microelectromechanical systems

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Proceedings Article | 2 October 2008 Paper

Paper

Hollow optical waveguide devices and systems

R. Jenkins, B. Perrett, M. McNie, E. Finlayson, R. Davies, J. Banerji, A. Davies

Proceedings Volume 7113, 71130E (2008) https://doi.org/10.1117/12.802454

KEYWORDS: Waveguides, Hollow waveguides, Wave propagation, Silicon, Photography, LIDAR, Multimode interference devices, Brain-machine interfaces, Sensors, Tolerancing

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Proceedings Article | 19 August 2008 Paper

Paper

A large area reconfigurable MOEMS microshutter array for coded aperture imaging systems

Mark McNie, David King, Nicola Price, David Combes, Gilbert Smith, Alan Brown, Neil Gordon, Steven Stone, Kevin Brunson, Keith Lewis, Christopher Slinger, Stanley Rogers

Proceedings Volume 7096, 70960D (2008) https://doi.org/10.1117/12.794996

KEYWORDS: Microopto electromechanical systems, Mirrors, Imaging systems, Mid-IR, Coded aperture imaging, Electrodes, Fabry–Perot interferometers, Control systems, Silicon, Image resolution

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Proceedings Article | 19 August 2008 Paper

Paper

Adaptive coded aperture imaging in the infrared: towards a practical implementation

Chris Slinger, Kevin Gilholm, Neil Gordon, Mark McNie, Doug Payne, Kevin Ridley, Malcolm Strens, Mike Todd, Geoff De Villiers, Philip Watson, Rebecca Wilson, Gavin Dyer, Mike Eismann, Joe Meola, Stanley Rogers

Proceedings Volume 7096, 709609 (2008) https://doi.org/10.1117/12.805372

KEYWORDS: Imaging systems, Signal to noise ratio, Mid-IR, Coded aperture imaging, Sensors, Infrared imaging, Infrared radiation, Staring arrays, Detection and tracking algorithms, Point spread functions

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Proceedings Article | 16 October 2007 Paper

Paper

Coded aperture systems as non-conventional lensless imagers for the visible and infrared

Chris Slinger, Neil Gordon, Keith Lewis, Gregor McDonald, Mark McNie, Doug Payne, Kevin Ridley, Malcolm Strens, Geoff De Villiers, Rebecca Wilson

Proceedings Volume 6737, 67370D (2007) https://doi.org/10.1117/12.739043

KEYWORDS: Diffraction, Coded aperture imaging, Detector arrays, Sensors, Imaging systems, Infrared imaging, Photomasks, Infrared radiation, Image quality, Microopto electromechanical systems

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Proceedings Article | 26 September 2007 Paper

Paper

Reconfigurable mask for adaptive coded aperture imaging (ACAI) based on an addressable MOEMS microshutter array

Mark McNie, David Combes, Gilbert Smith, Nicola Price, Kevin Ridley, Keith Lewis, Chris Slinger, Stanley Rogers

Proceedings Volume 6714, 67140B (2007) https://doi.org/10.1117/12.735894

KEYWORDS: Mirrors, Microopto electromechanical systems, Coded aperture imaging, Mid-IR, Switching, Electrodes, Modulators, Imaging systems, Silicon, Fabry–Perot interferometers

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Proceedings Article | 26 September 2007 Paper

Paper

An investigation of the potential for the use of a high resolution adaptive coded aperture system in the mid-wave infrared

Chris Slinger, Michael Eismann, Neil Gordon, Keith Lewis, Gregor McDonald, Mark McNie, Doug Payne, Kevin Ridley, Malcolm Strens, Geoff De Villiers, Rebecca Wilson

Proceedings Volume 6714, 671408 (2007) https://doi.org/10.1117/12.736071

KEYWORDS: Sensors, Diffraction, Signal to noise ratio, Coded aperture imaging, Detector arrays, Photomasks, Imaging systems, Image quality, Target detection, Mid-IR

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Proceedings Article | 8 December 2004 Paper

Paper

Micromachined modulator arrays for use in free-space optical communication systems

Keith Lewis, Kevin Ridley, Mark McNie, Gilbert Smith, Andrew Scott

Proceedings Volume 5614, (2004) https://doi.org/10.1117/12.578552

KEYWORDS: Modulators, Silicon, Modulation, Microopto electromechanical systems, Mirrors, Free space optical communications, Telecommunications, Fabry–Perot interferometers, Free space optics, Quantum wells

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Proceedings Article | 6 December 2004 Paper

Paper

Multimode interference (MMI) devices in silicon hollow waveguide technology for military electro-optic systems

Richard Jenkins, Mark McNie, Eric Gorton, Andrew Blockley, Jessica Maclean

Proceedings Volume 5612, (2004) https://doi.org/10.1117/12.578252

KEYWORDS: Waveguides, Multimode interference devices, Hollow waveguides, Brain-machine interfaces, Silicon, Spectroscopy, Tolerancing, Sensors, Copper, Signal attenuation

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Proceedings Article | 30 November 2004 Paper

Paper

Integrated micromachined filters for wavelength division multiplexing

Keith Lewis, Gilbert Smith, Mark McNie

Proceedings Volume 5618, (2004) https://doi.org/10.1117/12.578554

KEYWORDS: Silicon, Etching, Photomasks, Optical filters, Wavelength division multiplexing, Mirrors, Electronic filtering, Tunable filters, Refractive index, Reflectivity

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Proceedings Article | 16 August 2004 Paper

Paper

Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

Gerold Schropfer, Mark McNie, Mark da Silva, Rhodri Davies, Alexandra Rickard, Francois-Xavier Musalem

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544971

KEYWORDS: Computer aided design, Microelectromechanical systems, Manufacturing, Design for manufacturing, Resonators, Design for manufacturability, Monte Carlo methods, Materials processing, Tolerancing, Semiconducting wafers

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Proceedings Article | 15 January 2003 Paper

Paper

Performance enhancement and evaluation of deep dry etching on a production cluster platform

Mark McNie, Christopher Pickering, Alexandra Rickard, Iain Young, Janet Hopkins, Huma Ashraf, Serrita McAuley, Glenn Nicholls, Richard Barnett, Fred Roozeboom, Anton Kemmeren, Eric Van Den Heuvel, Jan Verhoeven, Colin Gormley, Paulo Schina, Corrado Di Luciano, Jyrki Kiihamaki

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478242

KEYWORDS: Etching, Semiconducting wafers, Dry etching, Silicon, Microsystems, Plasma, Microelectromechanical systems, Dielectrics, Oxides, Capacitors

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Proceedings Article | 28 September 2001 Paper

Paper

Engineering in- and out-of-plane stress in PECVD silicon nitride for CMOS-compatible surface micromachining

Rhodri Davies, Mark McNie, Kevin Brunson, David Combes

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442962

KEYWORDS: Plasma enhanced chemical vapor deposition, Semiconducting wafers, Silicon, Lithium, Surface micromachining, Composites, Chemical analysis, Micromachining, Digital Light Processing, Remote sensing

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Proceedings Article | 30 April 2001 Paper

Paper

Characterization and optimization of deep dry etching for MEMS applications

Alexandra Rickard, Mark McNie

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425287

KEYWORDS: Etching, Semiconducting wafers, Silicon, Anisotropy, Microelectromechanical systems, Dry etching, Oxides, Ions, Photomasks, High aspect ratio silicon micromachining

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Proceedings Article | 5 April 2001 Paper

Paper

Development of a workstation for optical testing and modification of IMEMS on a wafer

John Hedley, Alun Harris, James Burdess, Mark McNie

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425356

KEYWORDS: Semiconducting wafers, Laser ablation, Gyroscopes, Profilometers, Electrodes, Optical testing, Wafer-level optics, Vibrometry, Objectives, Measurement devices

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Proceedings Article | 8 September 1998 Paper

Paper

Polysilicon for everything?

M. Ward, Mark McNie, Robert Bunyan, David King, Roger Carline, Rebecca Wilson, J. Gillham

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323901

KEYWORDS: Sensors, Silicon, Microelectromechanical systems, Natural surfaces, Data analysis, Microelectronics, CMOS technology, Defense and security, Photomicroscopy, Raman spectroscopy

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Proceedings Article | 31 August 1998 Paper

Paper

CMOS compatibiltity of high-aspect-ratio micromachining (HARM) in bonded silicon-on-insulator (BSOI)

Mark McNie, David King

Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324311

KEYWORDS: Semiconducting wafers, Silicon, Micromachining, Dielectrics, Etching, Transistors, Capacitors, Dry etching, Information operations, Defense and security

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Showing 5 of 26 publications

Conference Committee Involvement (3)

Adaptive Coded Aperture Imaging and Non-Imaging Sensors V

25 August 2011 | San Diego, California, United States

Adaptive Coded Aperture Imaging and Non-Imaging Sensors IV

2 August 2010 | San Diego, California, United States

Adaptive Coded Aperture Imaging and Non-Imaging Sensors III

2 August 2009 | San Diego, California, United States

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