Dr. Mark G. da Silva Profile

Dr. Mark G. da Silva

Manager of Design Ctr. at Exponent Inc

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Publications (2)

Proceedings Article | 19 January 2007 Paper

Critical comparison of metrology techniques for MEMS

Mark da Silva, Siebe Bouwstra

Proceedings Volume 6463, 64630C (2007) https://doi.org/10.1117/12.714852

KEYWORDS: Microelectromechanical systems, Standards development, Metrology, Semiconducting wafers, Reliability, Thin films, Tolerancing, Resonators, Process control, Semiconductors

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Proceedings Article | 16 August 2004 Paper

Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

Gerold Schropfer, Mark McNie, Mark da Silva, Rhodri Davies, Alexandra Rickard, Francois-Xavier Musalem

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544971

KEYWORDS: Computer aided design, Microelectromechanical systems, Manufacturing, Design for manufacturing, Resonators, Design for manufacturability, Monte Carlo methods, Materials processing, Tolerancing, Semiconducting wafers

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