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Marten Oldsen
at Infineon Technologies AG
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Author
Publications (2)
Proceedings Article | 26 February 2008 Paper
A novel fabrication technology for anti-reflex wafer-level vacuum packaged microscanning mirrors
M. Oldsen, U. Hofmann, H. J. Quenzer, J. Janes, C. Stolte, K. Gruber, M. Ites, F. Sörensen, B. Wagner
Proceedings Volume 6882, 688208 (2008) https://doi.org/10.1117/12.760941
KEYWORDS: Semiconducting wafers, Mirrors, Wafer bonding, Silicon, Glasses, Scanners, Oxides, Optical resolution, Micromirrors, Gold
Proceedings Article | 21 February 2008 Paper
Wafer-level vacuum packaged resonant micro-scanning mirrors for compact laser projection displays
Ulrich Hofmann, Marten Oldsen, Hans-Joachim Quenzer, Joachim Janes, Martin Heller, Manfred Weiss, Georgios Fakas, Lars Ratzmann, Eleonora Marchetti, Francesco D'Ascoli, Massimiliano Melani, Luca Bacciarelli, Emilio Volpi, Francesco Battini, Luca Mostardini, Francesco Sechi, Marco De Marinis, Bernd Wagner
Proceedings Volume 6887, 688706 (2008) https://doi.org/10.1117/12.763433
KEYWORDS: Mirrors, Semiconducting wafers, Micromirrors, Silicon, Microelectromechanical systems, Laser based displays, Packaging, Scanners, Raster graphics, Sensors
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