Dr. Martin Schriever Profile

Dr. Martin Schriever

Director System Metrology at Carl Zeiss SMT GmbH

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Publications (2)

Proceedings Article | 28 May 2004 Paper

New paradigm in lens metrology for lithographic scanner: evaluation and exploration

Kafai Lai, Gregg Gallatin, Mark van de Kerkhof, Wim de Boeij, Haico Kok, Martin Schriever, Jaime Morillo, Robert Fair, Stephanie Bennett, Daniel Corliss

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536550

KEYWORDS: Monochromatic aberrations, Wavefronts, Metrology, Spatial frequencies, Lithography, Scanners, Sensors, Interferometers, Manufacturing, Spherical lenses

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Proceedings Article | 26 June 2003 Paper

Optimizing and enhancing optical systems to meet the low k₁ challenge

Donis Flagello, Robert Socha, Xuelong Shi, Jan van Schoot, Jan Baselmans, Mark van de Kerkhof, Wim de Boeij, Andre Engelen, Rene Carpaij, Oscar Noordman, Marco Moers, Melchior Mulder, Jo Finders, Henk van Greevenbroek, Martin Schriever, Manfred Maul, Helmut Haidner, Markus Goeppert, Ulrich Wegmann, Paul Graeupner

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485340

KEYWORDS: Lithographic illumination, Reticles, Wavefronts, Sensors, Semiconducting wafers, Light scattering, Lithography, Critical dimension metrology, Scanners, Control systems

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