Dr. Matthew Bryan Profile

Dr. Matthew Bryan

at POLLEN Metrology

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Publications (1)

Proceedings Article | 23 March 2020 Paper

Machine Learning assistant technology to facilitate Fin and 3D memory measurements on SEM and TEM images

J. Baderot, B. Darbon, N. Clement, M. Bryan, S. Martinez, J. Foucher

Proceedings Volume 11329, 113290X (2020) https://doi.org/10.1117/12.2552033

KEYWORDS: 3D metrology, Machine learning, Scanning electron microscopy, 3D image processing, Process engineering, Transmission electron microscopy, Image processing, 3D modeling, Semiconductors, Computer simulations

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