Mr. Md Iftekharul Islam Profile

Md Iftekharul Islam

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Publications (3)

Proceedings Article | 20 November 2024 Poster + Paper

First demonstration of MEMS Fabry-Perot pixel arrays for reprogrammable photomasks

Md Iftekharul Islam, Amrid Amnache, Richard Beaudry, Maurice Delafosse, Serge Ecoffey, Luc Fréchette

Proceedings Volume 13216, 132162G (2024) https://doi.org/10.1117/12.3034648

KEYWORDS: Lithography steppers, Microfabrication, Photomasks, Microelectromechanical systems, Optical transmission, Fabry Perot interferometers, Optical lithography, Lithography

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Proceedings Article | 22 November 2023 Poster

Programmable photomask for photolithography systems

Richard Beaudry, Iftekharul Islam, Amrid Amnache, Maurice Delafosse, Luc Fréchette

Proceedings Volume PC12751, PC1275111 (2023) https://doi.org/10.1117/12.2685212

KEYWORDS: Photomasks, Lithography, Prototyping, Overlay metrology, Optical lithography, Semiconductor manufacturing, Printing

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Proceedings Article | 21 November 2023 Poster + Paper

Programmable photomask for photolithography systems

Richard Beaudry, Md. Iftekharul Islam, Amrid Amnache, Maurice Delafosse, Luc Fréchette

Proceedings Volume 12751, 1275111 (2023) https://doi.org/10.1117/12.2685213

KEYWORDS: Photomasks, Lithography, Optical lithography, Semiconductor manufacturing, Prototyping, Printing, Overlay metrology

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