We are developing a new class of deformable optic based on electrostatic actuation of nanolaminate foils. These foils are engineered at the atomic level to provide optimal opto-mechanical properties, including surface quality, strength and stiffness, for a wide range of deformable optics. We are combining these foils, developed at Lawrence Livermore National Laboratory (LLNL), with commercial metal processing techniques to produce prototype deformable optics with aperture sizes up to 10 cm and actuator spacing from 1 mm to 1 cm and with a range of surface deformation designed to be as much as 10 microns. The existing capability for producing nanolaminate foils at LLNL, coupled with the commercial metal processing techniques being used, enable the potential production of these deformable optics with aperture sizes of over 1 m, and much larger deformable optics could potentially be produced by tiling multiple deformable segments. In addition, based on the fabrication processes being used, deformable nanolaminate optics could potentially be produced with areal densities of less than 1 kg per square m for applications in which lightweight deformable optics are desirable, and deformable nanolaminate optics could potentially be fabricated with intrinsically curved surfaces, including aspheric shapes. We will describe the basic principles of these devices, and we will present details of the design, fabrication and characterization of the prototype deformable nanolaminate optics that have been developed to date. We will also discuss the possibilities for future work on scaling these devices to larger sizes and developing both devices with lower areal densities and devices with curved surfaces.
MicroAssembly Technologies has developed an optical MEMS process based on the batch transfer of microstructures. This "plug and play" process enables integration of ultra-flat SOI reflectors with high-aspect MEMS actuators and high-voltage CMOS driver circuits. Interferometer measurements confirm that assembled mirror devices are extremely flat.
This ongoing work concerns the creation of a deformable mirror by the integration of MEMS actuators with Nanolaminate foils through metal compression boning. These mirrors will use the advantages of these disparate technologies to achieve dense actuation of a high-quality, continuous mirror surface. They will enable advanced adaptive optics systems in large terrestrial telescopes.
While MEMS actuators provide very dense actuation with high precision they can not provide large forces typically necessary to deform conventional mirror surfaces. Nanolaminate foils can be fabricated with very high surface quality while their extraordinary mechanical properties enable very thin, flexible foils to survive the rigors of fabrication. Precise metal compression bonding allows the attachment of the fragile MEMS actuators to the thin nanolaminate foils without creating distortions at the bond sites.
This paper will describe work in four major areas: 1) modeling and design, 2) bonding development, 3) nanolaminate foil development, 4) producing a prototype. A first-principles analytical model was created and used to determine the design parameters. A method of bonding was determined that is both strong, and minimizes the localized deformation or print through. Work has also been done to produce nanolaminate foils that are sufficiently thin, flexible and flat to be deformed by the MEMS actuators. Finally a prototype was produced by bonding thin, flexible nanolaminate foils to commercially available MEMS actuators.
Microassembly promises to extend MEMS beyond the confines of silicon micromachining. This paper surveys research in both serial and parallel microassembly. The former extends conventional `pick and place' assembly into the micro- domain, where surface forces play a dominant role. Parallel assembly involves the simultaneous precise organization of an ensemble of micro components. This can be achieved by microstructure transfer between aligned wafers or arrays of binding sites that trap an initially random collection of parts. Binding sites can be micromachined cavities or electrostatic traps: short-range attractive forces and random agitation of the parts serve to fill the sites. Microassembly strategies should furnish reliable mechanical bonds and electrical interconnection between the micropart and the target substrate or subassembly.
Microassembly promises to extend MEMS beyond the confines of silicon micromachining. This paper surveys research in both serial and parallel microassembly. The former extends conventional `pick and place' assembly into the micro- domain, where surface forces play a dominant role. Parallel assembly involves the simultaneous precise organization of an ensemble of micro components. This can be achieved by microstructure transfer between aligned wafers or arrays of binding sites that trap an initially random collection of parts. Binding sites can be micromachined cavities or electrostatic traps; short-range attractive forces and random agitation of the parts serve to fill the sites. Microassembly strategies should furnish reliable mechanical bonds and electrical interconnection between the micropart and the target substrate or subassembly.
Microassembly promises to extend MEMS beyond the confines of silicon micromachining. This paper surveys research in both serial and parallel microassembly. The former extends conventional `pick and place' assembly into the micro- domain, where surface forces play a dominant role. Parallel assembly involves the simultaneous precise organization of an ensemble of micro components. This can be achieved by microstructure transfer between aligned wafers or arrays of binding sites that trap an initially random collection of parts. Binding sites can be micromachined cavities or electrostatic traps; short-range attractive forces and random agitation of the parts serve to fill the sites. Microassembly strategies should furnish reliable mechanical bonds and electrical interconnection between the micropart and the target substrate or subassembly.
Microassembly promises to extend MEMS beyond the confines of silicon micromachining. This paper surveys research in both serial and parallel microassembly. The former extends conventional 'pick and place' assembly into the micro-domain, where surface forces play a dominant role. Parallel assembly involves the simultaneous precise organization of an ensemble of micro components. This can be achieved by microstructure transfer between aligned wafers or arrays of binding sites that trap an initially random collection of parts. Binding sites can be micromachined cavities or electrostatic traps; short-range attractive forces and random agitation of the parts serve to fill the sites. Microassembly strategies should furnish reliable mechanical bonds and electrical interconnection between the micropart and the target substrate or subassembly.
Microassembly promises to extend MEMS beyond the confines of silicon micromachining. This paper surveys research in both serial and parallel microassembly. The former extends conventional 'pick and place' assembly into the micro-domain, where surface forces play a dominant role. Parallel assembly involves the simultaneous precise organization of an ensemble of micro components. This can be achieved by microstructure transfer between aligned wafers or arrays of binding sites that trap an initially random collection of parts. Binding sites can be micromachined cavities or electrostatic traps; short-range attractive forces and random agitation of the parts serve to fill the sites. Microassembly strategies should furnish reliable mechanical bonds and electrical interconnection between the micropart and the target substrate or subassembly.
Robotic telesurgery is a promising application of robotics to medicine, aiming to enhance the dexterity and sensation of minimally invasive surgery through millimeter-scale manipulators under control of the surgeon. With appropriate communication links, it would also be possible to perform remote surgery for care in rural areas where specialty care is unavailable, or to provide emergency care en route to a hospital. The UC Berkeley/Endorobotics/UCSF Telesurgical Workstation is a master-slave telerobotic system, with two 6 degree of freedom (DOF) robotic manipulators, designed for laparoscopic surgery. The slave robotic has a 2 DOF wrist inside the body to allow high dexterity manipulation in addition to the 4 DOF of motion possible through the entry port, which are actuated by an external gross motion platform. The kinematics and the controller of the system are designed to accommodate the force and movement requirements of complex tasks, including suturing and knot tying. The system has force feedback in 4 axes to improve the sensation of telesurgery. In this paper, the telesurgical system will be introduced with discussion of kinematic and control issues and presentation of in vitro test results.
In implementing tactile feedback, we are considering the problems of tactile transduction, signal processing, and tactile stimulation. While some of the problems--e.g. sensing--have been addressed in the past, tactile simulation or 'tactile display,' as an informational medium is yet at a very early stage of development. Our work has focused on the design of a 5 X 5 tactile display, and the fabrication problems surrounding high spatio-temporal resolution. Using pneumatic actuators and a mix of conventional and micromachining techniques, we have prototyped and characterized the display, and created a linked sensor-display system. The display was characterized in the usual manner of a linear system and the ability of human subjects to discriminate patterns, forces, and displacements was measured. The display was found to have a maximum force output of 340 milliNewton at each element, force resolution of 4.4 bits, and a frequency response of 7 Hz. Human subjects were able to recognize simple geometric patterns presented on the display, discriminant forces with 3.3 bits resolution, and sense displacements of 0.1 mm (5% of the array spacing).
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