Michael B. Cohn
President at MicroAssembly Technologies Inc
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 28 June 2006 Paper
Proceedings Volume 6272, 62722N (2006) https://doi.org/10.1117/12.672733
KEYWORDS: Mirrors, Actuators, Metals, Lithography, Silicon, Epoxies, Nickel, Deformable mirrors, Semiconducting wafers, Adhesives

Proceedings Article | 23 January 2006 Paper
Michael Cohn, Kevin Chang, Alexandros Papavasiliou, Scot Oliver, Gina Kim, Gabriel Matus, Zhixiong Xiao, Steven Cheung, KaoSio Saechao, Ryan Roehnelt
Proceedings Volume 6113, 61130M (2006) https://doi.org/10.1117/12.658058
KEYWORDS: Actuators, Mirrors, Microelectromechanical systems, Reflectors, Adaptive optics, Assembly equipment, Micromirrors, Deformable mirrors, Spatial light modulators, Semiconducting wafers

Proceedings Article | 23 January 2006 Paper
Proceedings Volume 6113, 61130P (2006) https://doi.org/10.1117/12.657667
KEYWORDS: Actuators, Microelectromechanical systems, Mirrors, Metals, Deformable mirrors, Electrodes, Gold, Silicon, Prototyping, Sputter deposition

Proceedings Article | 10 September 1998 Paper
Michael Cohn, Karl Boehringer, J. Mark Noworolski, Angad Singh, Chris Keller, Kenneth Goldberg, Roger Howe
Proceedings Volume 3515, (1998) https://doi.org/10.1117/12.322082
KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Wafer bonding, Actuators, Silicon, Stochastic processes, Adhesives, Directed self assembly, Microfluidics, Particles

Proceedings Article | 8 September 1998 Paper
Michael Cohn, Karl Boehringer, J. Mark Noworolski, Angad Singh, Chris Keller, Kenneth Goldberg, Roger Howe
Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323891
KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Wafer bonding, Actuators, Silicon, Stochastic processes, Adhesives, Directed self assembly, Microfluidics, Particles

Showing 5 of 10 publications
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