Dr. Michael Rizzolo Profile

Dr. Michael Rizzolo

at IBM Thomas J Watson Research Ctr

SPIE Involvement:

Author

Publications (4)

SPIE Journal Paper | 21 February 2023 Open Access

Spectral interferometry for fully integrated device metrology

Daniel Schmidt, Manasa Medikonda, Michael Rizzolo, Claire Silvestre, Julien Frougier, Andrew Greene, Mary Breton, Aron Cepler, Jacob Ofek, Itzik Kaplan, Roy Koret, Igor Turovets

JM3, Vol. 22, Issue 03, 031203, (February 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031203

KEYWORDS: Metrology, Interferometry, Data modeling, Tunable filters, Semiconducting wafers, Scatterometry, Optical filters, Machine learning, Education and training, Dielectrics

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Proceedings Article | 8 June 2022 Presentation + Paper

Scatterometry-based methodologies for characterization of MRAM technology

M. Medikonda, D. Schmidt, M. Rizzolo, M. Breton, A. Dutta, H. Wu, E. Evarts, A. Cepler, R. Koret, I. Turovets, D. Edelstein

Proceedings Volume PC12053, PC120530J (2022) https://doi.org/10.1117/12.2614137

KEYWORDS: Metrology, Resistance, Critical dimension metrology, Chemical mechanical planarization, Logic, Data modeling, Instrument modeling, Scatterometry, Semiconducting wafers, Machine learning

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Proceedings Article | 26 May 2022 Presentation + Paper

Vertical travelling scatterometry for metrology on fully integrated devices

D. Schmidt, M. Medikonda, M. Rizzolo, C. Silvestre, J. Frougier, A. Greene, M. Breton, A. Cepler, J. Ofek, I. Kaplan, R. Koret, I. Turovets

Proceedings Volume 12053, 120530S (2022) https://doi.org/10.1117/12.2614077

KEYWORDS: Metrology, Semiconducting wafers, Scatterometry, Optical filters, Dielectrics, Data modeling, Back end of line, Front end of line, Chemical mechanical planarization, Transmission electron microscopy

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Proceedings Article | 24 March 2020 Presentation

Exploration of pillar local CDU improvement options for AI applications (Conference Presentation)

Chi-Chun Liu, Hao Tang, Yann Mignot, Ashim Dutta, Jennifer Church, Saumya Sharma, Dominik Metzler, Karen Petrillo, Michael Rizzolo, Luciana Meli, John Arnold, Nelson Felix

Proceedings Volume 11326, 113260W (2020) https://doi.org/10.1117/12.2552112

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