Dr. Michel Despont Profile

Dr. Michel Despont

at CSEM SA

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 4 March 2019 Paper

Large 1D and 2D micro-mirror arrays for universe and Earth observation

Frederic Zamkotsian, Yves Petremand, Patrick Lanzoni, Sebastien Lani, Rudy Barette, Branislav Timotijevic, Michel Despont

Proceedings Volume 10931, 1093103 (2019) https://doi.org/10.1117/12.2513287

KEYWORDS: Micromirrors, Semiconducting wafers, Mirrors, Clouds, Microopto electromechanical systems, Wafer bonding, Electrodes, Spectrographs, Spectroscopy

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Proceedings Article | 22 February 2018 Presentation + Paper

Novel micro-fabricated Fabry-Perot filters in infrared

Branislav Timotijevic, Andrea Dunbar, Arno Hoogerwerf, Nemanja Niketic, Ross Stanley, Michel Despont

Proceedings Volume 10545, 105450I (2018) https://doi.org/10.1117/12.2285363

KEYWORDS: Optical filters, Silicon, Metals, Infrared radiation, Semiconducting wafers, Fabry–Perot interferometers, Microfabrication, Gold, Mirrors

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Proceedings Article | 27 February 2015 Paper

2D tilting MEMS micro mirror integrating a piezoresistive sensor position feedback

S. Lani, Dara Bayat, M. Despont

Proceedings Volume 9375, 93750C (2015) https://doi.org/10.1117/12.2078618

KEYWORDS: Mirrors, Sensors, Piezoresistive sensors, Scanners, Microelectromechanical systems, Position sensors, Resistance, Micromirrors, Silicon, Wheatstone bridges

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Proceedings Article | 1 October 2013 Paper

Thermal probe nanolithography: in-situ inspection, high-speed, high-resolution, 3D

Felix Holzner, Philip Paul, Michel Despont, Lin Lee Cheong, James Hedrick, Urs Dürig, Armin Knoll

Proceedings Volume 8886, 888605 (2013) https://doi.org/10.1117/12.2032318

KEYWORDS: Electron beam lithography, Optical lithography, Nanolithography, Silicon, Polymers, Scanning probe lithography, Reactive ion etching, Photomasks, Lithography, Scanning electron microscopy

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Proceedings Article | 3 April 2010 Paper

Direct write 3-dimensional nanopatterning using probes

David Pires, Armin Knoll, Urs Duerig, Ute Drechsler, Michel Despont, Heiko Wolf, James Hedrick, Ekmini de Silva

Proceedings Volume 7637, 76371E (2010) https://doi.org/10.1117/12.847290

KEYWORDS: Optical lithography, Glasses, Silicon, Reactive ion etching, Lithography, Etching, Electron beam lithography, Molecules, Nanostructures, Sensors

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