CONFERENCE PROCEEDINGS
Advanced Search
Mitsuhiro Togashi
at SY Research Institute Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 3 April 2012 Paper
A study of optical penetration into the micro-periodic structure of semiconductor devices
Harutaka Sekiya, Mitsuhiro Togashi, Mitsunori Numata, Yasutsugu Usami, Suejin Cho, Yongdeok Jeong, Yusin Yang
Proceedings Volume 8324, 83242T (2012) https://doi.org/10.1117/12.916267
KEYWORDS: Refractive index, Transmittance, Dielectrics, Defect detection, Semiconductors, Inspection, Mass attenuation coefficient, Finite-difference time-domain method, Electromagnetic radiation, Electronics
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top