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Mohan Govindaraj
at Siemens EDA
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Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
Fast and accurate automatic wafer defect detection and classification using machine learning based SEM image analysis
Sanghyun Choi, Qian Xie, Nathan Greeneltch, Hyung Joo Lee, Mohan Govindaraj, Srividya Jayaram, Mark Pereira, Sayani Biswas, Samir Bhamidipati, Ilhami Torunoglu
Proceedings Volume 12955, 129553M (2024) https://doi.org/10.1117/12.3012184
KEYWORDS: Education and training, Scanning electron microscopy, Data modeling, Performance modeling, Defect detection, Machine learning, Object detection, Semiconducting wafers, Image analysis, Image quality
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