Mr. Mohan Govindaraj Profile

Mohan Govindaraj

at Siemens EDA

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Publications (2)

Proceedings Article | 18 September 2024 Paper

Automatic wafer defect detection and accurate classification using machine learning based analysis of SEM images

Sanghyun Choi, Nathan Greeneltch, Mohan Govindaraj, Srividya Jayaram, Mark Pereira, Sayani Biswas, Samir Bhamidipati, Ilhami Torunoglu

Proceedings Volume 13273, 132731L (2024) https://doi.org/10.1117/12.3031212

KEYWORDS: Data modeling, Scanning electron microscopy, Defect detection, Machine learning, Semiconducting wafers, Image classification

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Proceedings Article | 10 April 2024 Poster + Paper

Fast and accurate automatic wafer defect detection and classification using machine learning based SEM image analysis

Sanghyun Choi, Qian Xie, Nathan Greeneltch, Hyung Joo Lee, Mohan Govindaraj, Srividya Jayaram, Mark Pereira, Sayani Biswas, Samir Bhamidipati, Ilhami Torunoglu

Proceedings Volume 12955, 129553M (2024) https://doi.org/10.1117/12.3012184

KEYWORDS: Education and training, Scanning electron microscopy, Data modeling, Performance modeling, Defect detection, Machine learning, Object detection, Semiconducting wafers, Image analysis, Image quality

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