We present the design, fabrication, and preliminary testing of a flexible array of sensor switches intended for
applications in wearable electronics and sensor systems. The touch pad sensor arrays feature flexible printed circuit
board (flexible PCB) substrates and/or flexible conductive composite polymer (CCP) structures, resulting in highly
flexible switch arrays. Each switch consists of 4 elements: fascia, target, spacer and a sensor coil. The user presses the
fascia, bringing the target in contact with the sensor coil. Any change in the position of the target changes the coil
inductance due to the generation of eddy currents, which are detected by an electronic circuit and custom software.
Contact between the target and coil also measurably changes the inductance of the coils. Different sizes and geometries
(square, circular, hexagonal and octagonal) of coils in both flexible PCB metal (copper) and CCP were investigated to
determine which couple best with the CCP that forms the target for the inductive coils. We describe techniques for
patterning two-layer inductive coils on flexible PCBs. Using this process, we demonstrate coil trace thicknesses of 200
micrometers. We also present a new low cost microfabrication technique to create inductive flexible coils using
embedded CCP in polydimethylsiloxane (PDMS) as an alternative to flexible PCB metal coils. We further describe an
electronic circuit that accurately measures inductances as low as 500 nH that is used to detect the change in the
inductance of a sensor’s coil when the user presses the target element of the sensor. The inductance for a sensor
composed of CCP square coils and CCP target was measured to be approximately 35 μH before being pressed. When
pressed, the inductance dropped to 3.8 μH, a change which was easily detected.
KEYWORDS: Magnetism, Microfluidics, Polymers, Fabrication, Nanocomposites, Lab on a chip, Chemical analysis, Particles, Chemical elements, Ferromagnetics
This paper presents a new fabrication technique to achieve ultra high-aspect ratio artificial cilia micro-patterned from flexible highly magnetic rare earth nanoparticle-doped polymers. We have developed a simple, inexpensive and scalable fabrication method to create cilia structures that can be actuated by miniature electromagnets, that are suitable to be used for lab-on-a chip (LOC) and micro-total-analysis-system (μ-TAS) applications such as mixers and flow-control elements. The magnetic cilia are fabricated and magnetically polarized directly in microfluidic channels or reaction chambers, allowing for easy integration with complex microfluidic systems. These cilia structures can be combined on a single chip with other microfluidic components employing the same permanently magnetic nano-composite polymer (MNCP), such as valves or pumps. Rare earth permanent magnetic powder, (Nd0.7Ce0.3)10.5Fe83.9B5.6, is used to dope polydimethylsiloxane (PDMS), resulting in a highly flexible M-NCP of much higher magnetization and remanence [1] than ferromagnetic polymers typically employed in magnetic microfluidics. Sacrificial poly(ethylene-glycol) (PEG) is used to mold the highly magnetic polymer into ultra high-aspect ratio artificial cilia. Cilia structures with aspect ratio exceeding 8:0.13 can be easily fabricated using this technique and are actuated using miniature electromagnets to achieve a high range of motion/vibration.
An inexpensive and rapid micro-fabrication process for producing PMMA microfluidic components has been presented.
Our proposed technique takes advantages of commercially available economical technologies such as the silk screen
printing and UV patterning of PMMA substrates to produce the microfluidic components. As a demonstration of our
proposed technique, we had utilized a homemade deep-UV source, λ=254nm, a silk screen mask made using a local
screen-printing shop and Isopropyl alcohol - water mixture (IPA-water) as developer to quickly define the microfluidic
patterns. The prototyped devices were successfully bonded, sealed, and the device functionality tested and demonstrated.
The screen printing based technique can produce microfluidic channels as small as 50 micrometers quite easily, making
this technique the most cost-effective, fairly high precision and at the same time an ultra economical plastic microfluidic
components fabrication process reported to date.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.