Naoki Nonaka
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 November 2023 Poster + Paper
Yukihide Kohira, Haruki Nakayama, Naoki Nonaka, Tomomi Matsui, Atsushi Takahashi, Chikaaki Kodama
Proceedings Volume 12751, 127511D (2023) https://doi.org/10.1117/12.2687615
KEYWORDS: Source mask optimization, Tolerancing, Optical proximity correction, Semiconducting wafers, SRAF, Quantum annealing

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