Mr. Nils Benkert Profile

Nils Benkert

at Fraunhofer IOF

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Publications (2)

Proceedings Article | 4 November 2003 Paper

VUV light-scattering measurements of substrates and thin film coatings

Annette Hultaker, Stefan Gliech, Nils Benkert, Angela Duparre

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.505585

KEYWORDS: Scatter measurement, Scattering, Light scattering, Reflectivity, Transmittance, Vacuum ultraviolet, Atomic force microscopy, Thin film coatings, Backscatter, Optical coatings

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Proceedings Article | 30 May 2003 Paper

Characterizing CaF2 for VUV optical components: roughness, surface scatter, and bulk scatter

Annette Hultaker, Nils Benkert, Stefan Gliech, Angela Duparre

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472392

KEYWORDS: Vacuum ultraviolet, Optical components, Laser optics, Dysprosium, Scattering, Laser induced damage, Ruthenium, Scatter measurement, Surface roughness, Reflectivity

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