Directly interfacing a photonic integrated circuit allows at best an alignment tolerance of a few micrometer due to the small dimensions of optical (coupling) features on chip, but when using microlenses integrated on the substrate-side, alignment tolerances for interfacing the chips can greatly be relaxed. This is demonstrated on a 750 μm thick chip with standard grating couplers (operation wavelength around 1550 nm). Low roughness silicon microlenses were realized by transferring reflowed photoresist into the silicon substrate using reactive ion etching. The microlens allows interfacing the chip from the backside with an expanded beam, drastically increasing lateral alignment tolerances. A 1 dB alignment tolerance of ±8 μm and ±11 μm (along and perpendicular to the grating coupler direction, respectively) was experimentally found when a 40 μm mode field diameter beam was used at the input.
Waveguides with Bragg gratings realized on a flat polymer foil are promising candidates for advanced strain sensors since such a planar approach allows precise positioning of multiple sensors in various well-defined directions, in the same foil. As such, an optical version of an electrical strain gage can be realized. Herein, several parameters are discussed which define the behaviour of such sensor foils, in particular the grating design, including the wavelength of operation and mechanical and optical properties of the used polymers. Epoxy and Ormocer®-based Bragg grating sensors operating at 850 nm and 1550 nm wavelength were realized using nano-imprint lithography and laser direct-write lithography and their strain and temperature sensitivities were compared. Finally, it is demonstrated that optical strain gage rosettes can be realized by multiplexing 3 angularly displaced sensors in the same waveguide on a single foil.
This paper demonstrates that epoxy-based single mode polymer waveguides with Bragg gratings can be realized in very thin (down to 50 micron) polymer foils which are suitable for strain sensing when integrated inside glass fiber reinforced polymer composite materials. The single mode waveguides were fabricated using laser direct-write lithography and the gratings were realized using nanoimprint lithography. These steps were performed on a temporary rigid carrier substrate and afterwards the functional layers were released yielding the thin, flexible sensor foils which can be laser-cut to the required dimensions. The Bragg grating-based polymer waveguide sensor foils were characterized before and after embedding into the composite. As expected, there was a blue shift in the reflection spectrum because of residual strain due to the embedding process. However, the quality of the signal did not degrade after embedding, both for 50 and 100 micron thick sensor foils. Finally, the sensitivity to strain of the embedded sensors was determined using a tensile test and found to be about 1 pm / microstrain.
Composite materials are extensively used in a wide array of application markets by virtue of their strength, stiffness and lightness. Many composite structures are replaced today not only after failure but also before, for precautionary reasons. Adding optical sensing intelligence to these structures not only prolongs their lifetime but also significantly reduces the use of raw materials and energy. The use of optical based sensors offer numerous advantages i.e. integrability, high sensitivity, compactness and electromagnetic immunity. Most sensors integrated in composites are based on silica fibers with Bragg gratings. However, polymers are an interesting alternative because they present several advantages. They have high values in the opticalconstants involved in sensing, are cost-effective and allow larger elongations than silica. Moreover, planar optical waveguides represent an interesting approach to be further integrated e.g. in circuits. We present a comparison between Ormocer®-based and epoxy-based polymer waveguide Bragg grating sensors. Both polymers were screened for their compatibility with composite production processes and for their sensitivity to measure temperature and stress. Ormocer®-based sensors were found to exhibit a very high sensitivity (-250 pm/°C) for temperature sensing, while the epoxy-based sensors, although less sensitive (-90 pm/°C) were more compatible with the epoxy-based composite production process. In terms of sensitivity to measure stress, both materials were found to be analogous with measured values of (2.98 pm/μepsilon) for the epoxy-based and (3.00 pm/μepsilon) for Ormocer®-based sensors.
In this work, the reverse replication of circular micro grating structures on glass substrates is implemented using an ultra-violet curable resin and a polydimethylsiloxane (PDMS) mold which has the same structure as the original circular grating master. Two different techniques (“double PDMS replication” and “polymer- PDMS replication”) are employed to fabricate those reversed circular micro grating structures. Surface profiling measurements show that in case of the polymer-PDMS replication the dimensions of the resulting circular grating structures closely approximate those of the master, while the grating height is slightly decreased in case of the double PDMS replication technique, mainly due to the use of the releasing agent. For both methods, the grating slopes of the circular gratings are almost unchanged, leading to the desired optical performance. The two techniques are quite useful for more accurate reverse replications of micro optical and photonic structures.
We present a polymer optical waveguide integration technology for the detection of nanoparticles in an evanescent field based biosensor. In the proposed biosensor concept, super-paramagnetic nanoparticles are used as optical contrast labels. The nanoparticles capture target molecules from a sample fluid and bind to the sensor surface with biological specificity. The surface-bound nanoparticles are then detected using frustration of an evanescent field. In the current paper we elaborate on the polymer waveguides which are used to generate a well-defined optical field for nanoparticle detection.
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