Dr. Pen-Nan Liao Profile

Dr. Pen-Nan Liao

at Dupont

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Publications (2)

Proceedings Article | 20 October 2021 Presentation + Paper

An EUV photomask cleaning solution for the removal of tin contaminate

Pen-Nan Liao, Bryan Barton

Proceedings Volume 11855, 118550H (2021) https://doi.org/10.1117/12.2602029

KEYWORDS: Tin, Photomasks, Extreme ultraviolet, Etching, Ruthenium, Semiconducting wafers, Scanning probe microscopy, Particles, Mask cleaning, Ions

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Proceedings Article | 12 October 2021 Presentation + Paper

Development of fluoro-free surfactant rinse solutions for EUV photoresists

Pen-Nan Liao, Bryan Barton, Ping Hsu

Proceedings Volume 11854, 1185409 (2021) https://doi.org/10.1117/12.2602147

KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Capillaries, Photoresist developing, Polymers, Extreme ultraviolet, Semiconducting wafers

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