Mr. Philippe Maillot Profile

Philippe Maillot

Mgr R&D Quality and Metrology at STMicroelectronics

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Publications (4)

Proceedings Article | 2 April 2014 Paper

In cleanroom, sub-ppb real-time monitoring of volatile organic compounds using proton-transfer reaction/time of flight/mass spectrometry

Nathalie Hayeck, Philippe Maillot, Thomas Vitrani, Nicolas Pic, Henri Wortham, Sasho Gligorovski, Brice Temime-Roussel, Aurélie Mizzi, Irène Poulet

Proceedings Volume 9050, 905021 (2014) https://doi.org/10.1117/12.2045579

KEYWORDS: Ions, Optical lithography, Contamination, Lenses, Neodymium, Environmental sensing, Spectroscopy, Mass spectrometry, Lithography, Testing and analysis

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Proceedings Article | 20 April 2011 Paper

Optical far field measurements applied to microroughness determination of periodic microelectronic structures

Alexandre Vauselle, Philippe Maillot, Gaëlle Georges, Carole Deumié

Proceedings Volume 7971, 797112 (2011) https://doi.org/10.1117/12.879436

KEYWORDS: Scattering, Light scattering, Atomic force microscopy, Scatter measurement, Diffraction, Spatial frequencies, Diffraction gratings, Microelectronics, Scanning tunneling microscopy, Optical testing

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Proceedings Article | 2 September 2010 Paper

Roughness influence on periodic gratings and application to optical metrology of roughness

Alexandre Vauselle, Laurent Arnaud, Gaëlle Georges, Claude Amra, Carole Deumié, Philippe Maillot

Proceedings Volume 7792, 77920W (2010) https://doi.org/10.1117/12.860773

KEYWORDS: Scattering, Diffraction gratings, Diffraction, Light scattering, Scatter measurement, Atomic force microscopy, 3D modeling, Fourier transforms, Microelectronics, Optical metrology

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Proceedings Article | 15 February 1994 Paper

Comparison of rapid thermal processing and furnace processing for quarter-micrometer CMOS

Badih El-Kareh, Ashwin Ghatalia, Mark Kellam, Philippe Maillot, Carlton Osburn, Xiaoqiang Zhang

Proceedings Volume 2091, (1994) https://doi.org/10.1117/12.167352

KEYWORDS: Oxides, Boron, Field effect transistors, Semiconducting wafers, Silicon, Phosphorus, Transmission electron microscopy, Diffusion, Arsenic, Oxidation

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