Mr. Remi Le Tiec Profile

Remi Le Tiec

Process Support Engineer at Applied Materials France

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Publications (2)

Proceedings Article | 5 March 2021 Presentation

Advanced roughness characterization for 300mm Si photonics patterning and optimization

Remi Le Tiec, Shimon Levi, Angela Kravtsov, Olga Novak, Cecilia Dupre, Cyril Vannuffel, Tristan Dewolf, Stephanie Garcia, Quentin Wilmart, Jonathan Faugier-Tovar

Proceedings Volume 11690, 116900K (2021) https://doi.org/10.1117/12.2578550

KEYWORDS: Silicon photonics, Silicon, Photonics, Optical lithography, Line edge roughness, Wafer-level optics, Metrology, Line width roughness, Semiconducting wafers

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Proceedings Article | 19 March 2018 Presentation

DSA process characterization using BSE metrology (Conference Presentation)

Remi Le Tiec, Shimon Levi, Ahmed Gharbi, Maxime Argoud, Raluca Tiron, Gaelle Chamiot Maitral, Stephane Rey

Proceedings Volume 10586, 1058610 (2018) https://doi.org/10.1117/12.2299634

KEYWORDS: Directed self assembly, Metrology, Optical lithography, Etching, Manufacturing, 3D metrology, Materials processing, Polymers, Image processing, Scanning electron microscopy

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