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Richard L. Barber
Research Student at Swinburne Univ of Technology
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Publications (4)
SPIE Journal Paper | 1 July 2007
Study of stress and adhesion strength in SU-8 resist layers on silicon substrate with different seed layers
JM3, Vol. 6, Issue 03, 033006, (July 2007) https://doi.org/10.1117/12.10.1117/1.2778644
KEYWORDS: Silicon, Titanium, Gold, Metals, Copper, Chromium, Polymethylmethacrylate, Semiconducting wafers, X-ray lithography, Chemical analysis
Proceedings Article | 2 April 2004 Paper
An investigation of SU-8 resist adhesion in deep x-ray lithography of high-aspect-ratio structures
Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.521170
KEYWORDS: Silicon, Radium, Lithography, X-ray lithography, Ultraviolet radiation, Polymethylmethacrylate, X-rays, Semiconducting wafers, Photoresist processing, Gold
Proceedings Article | 14 October 2003 Paper
Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA
Proceedings Volume 5062, (2003) https://doi.org/10.1117/12.514474
KEYWORDS: Excimer lasers, Polymethylmethacrylate, Microfluidics, Micromachining, Photomasks, Photoresist materials, Silicon, Polymers, Lithography, Ultraviolet radiation
Proceedings Article | 6 April 2001 Paper
Synthetic opal as a template for nanostructured materials
Paul White, Lindsey Heales, Richard Barber, Terence Turney
Proceedings Volume 4234, (2001) https://doi.org/10.1117/12.424412
KEYWORDS: Optical spheres, Liquids, Crystals, Silicon, Thin films, Silica, Polymethylmethacrylate, Metals, Solids, Microfluidics
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